AU2002347820A1 - Method and apparatus for controlling cmp pad surface finish - Google Patents

Method and apparatus for controlling cmp pad surface finish

Info

Publication number
AU2002347820A1
AU2002347820A1 AU2002347820A AU2002347820A AU2002347820A1 AU 2002347820 A1 AU2002347820 A1 AU 2002347820A1 AU 2002347820 A AU2002347820 A AU 2002347820A AU 2002347820 A AU2002347820 A AU 2002347820A AU 2002347820 A1 AU2002347820 A1 AU 2002347820A1
Authority
AU
Australia
Prior art keywords
surface finish
pad surface
cmp pad
controlling cmp
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002347820A
Inventor
Jeffrey Farber
Alan J. Jensen
Peter Renteln
Mario Stella
Eugene Zhao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2002347820A1 publication Critical patent/AU2002347820A1/en
Abandoned legal-status Critical Current

Links

AU2002347820A 2001-10-26 2002-10-04 Method and apparatus for controlling cmp pad surface finish Abandoned AU2002347820A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/039,749 2001-10-26

Publications (1)

Publication Number Publication Date
AU2002347820A1 true AU2002347820A1 (en) 2003-05-12

Family

ID=

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