AU2002345179A1 - Method of depositing aluminium nitride - Google Patents

Method of depositing aluminium nitride

Info

Publication number
AU2002345179A1
AU2002345179A1 AU2002345179A AU2002345179A AU2002345179A1 AU 2002345179 A1 AU2002345179 A1 AU 2002345179A1 AU 2002345179 A AU2002345179 A AU 2002345179A AU 2002345179 A AU2002345179 A AU 2002345179A AU 2002345179 A1 AU2002345179 A1 AU 2002345179A1
Authority
AU
Australia
Prior art keywords
aluminium nitride
depositing aluminium
depositing
nitride
aluminium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002345179A
Inventor
Paul Rich
Claire Louise Wiggins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002345179A1 publication Critical patent/AU2002345179A1/en
Abandoned legal-status Critical Current

Links

AU2002345179A 2001-07-07 2002-06-20 Method of depositing aluminium nitride Abandoned AU2002345179A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0116688.3 2001-07-07

Publications (1)

Publication Number Publication Date
AU2002345179A1 true AU2002345179A1 (en) 2003-01-29

Family

ID=

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