AU2002341472A1 - Method for the production of silicon nitride - Google Patents

Method for the production of silicon nitride

Info

Publication number
AU2002341472A1
AU2002341472A1 AU2002341472A AU2002341472A AU2002341472A1 AU 2002341472 A1 AU2002341472 A1 AU 2002341472A1 AU 2002341472 A AU2002341472 A AU 2002341472A AU 2002341472 A AU2002341472 A AU 2002341472A AU 2002341472 A1 AU2002341472 A1 AU 2002341472A1
Authority
AU
Australia
Prior art keywords
production
silicon nitride
nitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002341472A
Inventor
Norbert Auner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Dow Silicones Corp
Original Assignee
Wacker Chemie AG
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG, Dow Corning Corp filed Critical Wacker Chemie AG
Publication of AU2002341472A1 publication Critical patent/AU2002341472A1/en
Abandoned legal-status Critical Current

Links

AU2002341472A 2001-05-03 2002-04-26 Method for the production of silicon nitride Abandoned AU2002341472A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10121476.6 2001-05-03

Publications (1)

Publication Number Publication Date
AU2002341472A1 true AU2002341472A1 (en) 2002-11-18

Family

ID=

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