AU2002344001A1 - Device and method for microwave plasma processing, and microwave power supply device - Google Patents

Device and method for microwave plasma processing, and microwave power supply device

Info

Publication number
AU2002344001A1
AU2002344001A1 AU2002344001A AU2002344001A AU2002344001A1 AU 2002344001 A1 AU2002344001 A1 AU 2002344001A1 AU 2002344001 A AU2002344001 A AU 2002344001A AU 2002344001 A AU2002344001 A AU 2002344001A AU 2002344001 A1 AU2002344001 A1 AU 2002344001A1
Authority
AU
Australia
Prior art keywords
microwave
power supply
plasma processing
supply device
microwave power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002344001A
Inventor
Naohisa Goto
Tetsuya Goto
Masaki Hirayama
Tadahiro Ohmi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002344001A1 publication Critical patent/AU2002344001A1/en
Abandoned legal-status Critical Current

Links

AU2002344001A 2001-10-19 2002-10-18 Device and method for microwave plasma processing, and microwave power supply device Abandoned AU2002344001A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-322529 2001-10-19

Publications (1)

Publication Number Publication Date
AU2002344001A1 true AU2002344001A1 (en) 2003-05-06

Family

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