AU2002343807A1 - Polishing fluid and polishing method - Google Patents

Polishing fluid and polishing method

Info

Publication number
AU2002343807A1
AU2002343807A1 AU2002343807A AU2002343807A AU2002343807A1 AU 2002343807 A1 AU2002343807 A1 AU 2002343807A1 AU 2002343807 A AU2002343807 A AU 2002343807A AU 2002343807 A AU2002343807 A AU 2002343807A AU 2002343807 A1 AU2002343807 A1 AU 2002343807A1
Authority
AU
Australia
Prior art keywords
polishing
fluid
polishing method
polishing fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002343807A
Inventor
Jin Amanokura
Sou Anzai
Masato Fukasawa
Takafumi Sakurada
Shouichi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of AU2002343807A1 publication Critical patent/AU2002343807A1/en
Abandoned legal-status Critical Current

Links

AU2002343807A 2001-10-31 2002-10-31 Polishing fluid and polishing method Abandoned AU2002343807A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-334376 2001-10-31
JP2002-10280 2002-01-18
JP2002-160181 2002-05-31

Publications (1)

Publication Number Publication Date
AU2002343807A1 true AU2002343807A1 (en) 2003-05-12

Family

ID=

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