Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002332941A
Inventor
Hugo Pristauz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Datacon Semiconductor Equipment GmbH
Original Assignee
Datacon Semiconductor Equipment GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Datacon Semiconductor Equipment GmbHfiledCriticalDatacon Semiconductor Equipment GmbH
Publication of AU2002332941A1publicationCriticalpatent/AU2002332941A1/en