AU2002326296A1 - Semiconductor structure implementing sacrificial material and methods for making and implementing the same - Google Patents

Semiconductor structure implementing sacrificial material and methods for making and implementing the same

Info

Publication number
AU2002326296A1
AU2002326296A1 AU2002326296A AU2002326296A AU2002326296A1 AU 2002326296 A1 AU2002326296 A1 AU 2002326296A1 AU 2002326296 A AU2002326296 A AU 2002326296A AU 2002326296 A AU2002326296 A AU 2002326296A AU 2002326296 A1 AU2002326296 A1 AU 2002326296A1
Authority
AU
Australia
Prior art keywords
implementing
making
methods
same
semiconductor structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002326296A
Inventor
Yehiel Gotkis
Rodney Kistler
David Wei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2002326296A1 publication Critical patent/AU2002326296A1/en
Abandoned legal-status Critical Current

Links

AU2002326296A 2001-03-28 2002-03-26 Semiconductor structure implementing sacrificial material and methods for making and implementing the same Abandoned AU2002326296A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/821,415 2001-03-28

Publications (1)

Publication Number Publication Date
AU2002326296A1 true AU2002326296A1 (en) 2003-01-02

Family

ID=

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