AU2002315761A1 - Substrate processing apparatus - Google Patents

Substrate processing apparatus

Info

Publication number
AU2002315761A1
AU2002315761A1 AU2002315761A AU2002315761A AU2002315761A1 AU 2002315761 A1 AU2002315761 A1 AU 2002315761A1 AU 2002315761 A AU2002315761 A AU 2002315761A AU 2002315761 A AU2002315761 A AU 2002315761A AU 2002315761 A1 AU2002315761 A1 AU 2002315761A1
Authority
AU
Australia
Prior art keywords
processing apparatus
substrate processing
substrate
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315761A
Inventor
Takashi Aiuchi
Takashi Imafu
Hirotsugu Kamamoto
Kazuhisa Sakamoto
Akihito Suzuki
Shuichi Yonemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002315761A1 publication Critical patent/AU2002315761A1/en
Abandoned legal-status Critical Current

Links

AU2002315761A 2001-07-04 2002-07-02 Substrate processing apparatus Abandoned AU2002315761A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-203322 2001-07-04

Publications (1)

Publication Number Publication Date
AU2002315761A1 true AU2002315761A1 (en) 2003-01-21

Family

ID=

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