AU2002311064A1 - Method for producing adaptronic microsystems - Google Patents

Method for producing adaptronic microsystems

Info

Publication number
AU2002311064A1
AU2002311064A1 AU2002311064A AU2002311064A AU2002311064A1 AU 2002311064 A1 AU2002311064 A1 AU 2002311064A1 AU 2002311064 A AU2002311064 A AU 2002311064A AU 2002311064 A AU2002311064 A AU 2002311064A AU 2002311064 A1 AU2002311064 A1 AU 2002311064A1
Authority
AU
Australia
Prior art keywords
adaptronic
microsystems
producing
producing adaptronic
adaptronic microsystems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002311064A
Inventor
Thomas Gesang
Harald Knabel
Uwe Maurieschat
Helmut Schafer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of AU2002311064A1 publication Critical patent/AU2002311064A1/en
Abandoned legal-status Critical Current

Links

AU2002311064A 2001-03-16 2002-03-15 Method for producing adaptronic microsystems Abandoned AU2002311064A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10112862.2 2001-03-16

Publications (1)

Publication Number Publication Date
AU2002311064A1 true AU2002311064A1 (en) 2002-10-03

Family

ID=

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