AU2002217138A1 - Method for producing microstructured components - Google Patents

Method for producing microstructured components

Info

Publication number
AU2002217138A1
AU2002217138A1 AU2002217138A AU2002217138A AU2002217138A1 AU 2002217138 A1 AU2002217138 A1 AU 2002217138A1 AU 2002217138 A AU2002217138 A AU 2002217138A AU 2002217138 A AU2002217138 A AU 2002217138A AU 2002217138 A1 AU2002217138 A1 AU 2002217138A1
Authority
AU
Australia
Prior art keywords
microstructured components
producing microstructured
producing
components
microstructured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002217138A
Inventor
Steffen Biehl
Tzvetan Ivanov
Ivo Rangelow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
U-SEN MIKROSYSTEMTECHNIK GmbH
Universitaet Kassel
Original Assignee
U SEN MIKROSYSTEMTECHNIK GmbH
UNI GESAMTHOCHSCHULE KASSEL
Universitaet Kassel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by U SEN MIKROSYSTEMTECHNIK GmbH, UNI GESAMTHOCHSCHULE KASSEL, Universitaet Kassel filed Critical U SEN MIKROSYSTEMTECHNIK GmbH
Publication of AU2002217138A1 publication Critical patent/AU2002217138A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B81B1/006—Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters
    • B81B1/008—Microtips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
AU2002217138A 2001-01-08 2001-12-19 Method for producing microstructured components Abandoned AU2002217138A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10100439.7 2001-01-08
DE10100439A DE10100439A1 (en) 2001-01-08 2001-01-08 Process for the production of microstructured components
PCT/EP2001/015021 WO2002053489A2 (en) 2001-01-08 2001-12-19 Method for producing microstructured components

Publications (1)

Publication Number Publication Date
AU2002217138A1 true AU2002217138A1 (en) 2002-07-16

Family

ID=7669914

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002217138A Abandoned AU2002217138A1 (en) 2001-01-08 2001-12-19 Method for producing microstructured components

Country Status (3)

Country Link
AU (1) AU2002217138A1 (en)
DE (1) DE10100439A1 (en)
WO (1) WO2002053489A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100682968B1 (en) 2005-02-11 2007-02-15 삼성전자주식회사 Probe for data storage apparatus
DE102007056992B4 (en) * 2007-11-27 2012-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing submicrometer structures on a pronounced topography

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4964946A (en) * 1990-02-02 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Process for fabricating self-aligned field emitter arrays
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
JP3249288B2 (en) * 1994-03-15 2002-01-21 株式会社東芝 Micro vacuum tube and method of manufacturing the same
WO1996003641A1 (en) * 1994-07-28 1996-02-08 Kley Victor B Scanning probe microscope assembly
DE19911046B4 (en) * 1999-03-12 2006-10-26 Robert Bosch Gmbh plasma process

Also Published As

Publication number Publication date
WO2002053489A2 (en) 2002-07-11
WO2002053489A3 (en) 2003-08-07
DE10100439A1 (en) 2002-07-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase