AU2002307199A1 - Method of fabricating micromachined devices - Google Patents

Method of fabricating micromachined devices

Info

Publication number
AU2002307199A1
AU2002307199A1 AU2002307199A AU2002307199A AU2002307199A1 AU 2002307199 A1 AU2002307199 A1 AU 2002307199A1 AU 2002307199 A AU2002307199 A AU 2002307199A AU 2002307199 A AU2002307199 A AU 2002307199A AU 2002307199 A1 AU2002307199 A1 AU 2002307199A1
Authority
AU
Australia
Prior art keywords
micromachined devices
fabricating micromachined
fabricating
devices
micromachined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002307199A
Inventor
Aramais Avakian
Chen-Wei Chiu
Jeff Dickson
Fukang Jiang
Yu-Chong Tai
Tom Tsao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Umachines Inc
Original Assignee
Umachines Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Umachines Inc filed Critical Umachines Inc
Publication of AU2002307199A1 publication Critical patent/AU2002307199A1/en
Abandoned legal-status Critical Current

Links

AU2002307199A 2001-04-25 2002-04-05 Method of fabricating micromachined devices Abandoned AU2002307199A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/843,025 2001-04-25

Publications (1)

Publication Number Publication Date
AU2002307199A1 true AU2002307199A1 (en) 2002-11-11

Family

ID=

Similar Documents

Publication Publication Date Title
AU2002364528A1 (en) Bio-implant and method of making the same
AU2002360713A1 (en) Methods of making electromechanical three-trace junctions devices
AU2002258696A1 (en) Mems resonators and methods for manufacturing mems resonators
AU2002306289A1 (en) Method of manufacturing silicon
AU2002234603A1 (en) Method for the manufacture of micro structures
AU2002256802A1 (en) Method of producing silver-copper alloys
AU2002347394A1 (en) Method of making models
AUPR704501A0 (en) A method of manufacturing structural units
AU2002351532A1 (en) Method of sampling
AU2002307199A1 (en) Method of fabricating micromachined devices
AU2002309200A1 (en) Microelctronic device and method of its manufacture
AU2002327469A1 (en) Mems and method of manufacturing mems
EP1227060A3 (en) Micromechanical device and process for its manufacture
AU2002246290A1 (en) Superstability of thin-walled structures
AU2002307357A1 (en) Method of fabricating a microstructure
AU2002352014A1 (en) Method for the production of organodiphosphonites
AU2002344009A1 (en) Method of forming tubular member
AU2002338254A1 (en) Electrostatically actuated micro-electro-mechanical devices and method of manufacture
AU2002338253A1 (en) Electrostatically actuated micro-electro-mechanical devices and method of manufacture
AU2002344548A1 (en) Method of manufacturing hollow member
AUPR648501A0 (en) Method of manufacture
AU2002310979A1 (en) Method of producing fluoroalkylphosphates
AU2002225009A1 (en) Method of producing 1-alkyl-3-aryl-5-difluoromethoxy-1h-pyrazoles
AU2002250055A1 (en) Method of manufacturing liposomes
AU2002308836A1 (en) Method of forming fibre based structures