AU2002259151A1 - Integrated thin film liquid conductivity sensor - Google Patents

Integrated thin film liquid conductivity sensor

Info

Publication number
AU2002259151A1
AU2002259151A1 AU2002259151A AU2002259151A AU2002259151A1 AU 2002259151 A1 AU2002259151 A1 AU 2002259151A1 AU 2002259151 A AU2002259151 A AU 2002259151A AU 2002259151 A AU2002259151 A AU 2002259151A AU 2002259151 A1 AU2002259151 A1 AU 2002259151A1
Authority
AU
Australia
Prior art keywords
thin film
conductivity sensor
film liquid
integrated thin
liquid conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002259151A
Inventor
Dongming He
Mark A. Shannon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Illinois
Original Assignee
University of Illinois
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Illinois filed Critical University of Illinois
Publication of AU2002259151A1 publication Critical patent/AU2002259151A1/en
Abandoned legal-status Critical Current

Links

AU2002259151A 2001-05-08 2002-05-07 Integrated thin film liquid conductivity sensor Abandoned AU2002259151A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/850,719 2001-05-08

Publications (1)

Publication Number Publication Date
AU2002259151A1 true AU2002259151A1 (en) 2002-11-18

Family

ID=

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