AU2002255546A1 - Methods for cleaning microelectronic structures - Google Patents

Methods for cleaning microelectronic structures

Info

Publication number
AU2002255546A1
AU2002255546A1 AU2002255546A AU2002255546A AU2002255546A1 AU 2002255546 A1 AU2002255546 A1 AU 2002255546A1 AU 2002255546 A AU2002255546 A AU 2002255546A AU 2002255546 A AU2002255546 A AU 2002255546A AU 2002255546 A1 AU2002255546 A1 AU 2002255546A1
Authority
AU
Australia
Prior art keywords
methods
microelectronic structures
cleaning microelectronic
cleaning
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002255546A
Inventor
David E. Brainard
Michael E. Cole
Joseph M. Desimone
James P. Deyoung
Stephen M. Gross
James B. Mcclain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MiCell Technologies Inc
Original Assignee
MiCell Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MiCell Technologies Inc filed Critical MiCell Technologies Inc
Publication of AU2002255546A1 publication Critical patent/AU2002255546A1/en
Abandoned legal-status Critical Current

Links

AU2002255546A 2001-02-15 2002-02-14 Methods for cleaning microelectronic structures Abandoned AU2002255546A1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US60/269,026 2001-02-15
US09/932,063 2001-08-17
US09/951,259 2001-09-13
US09/951,249 2001-09-13
US09/951,247 2001-09-13
US09/951,092 2001-09-13

Publications (1)

Publication Number Publication Date
AU2002255546A1 true AU2002255546A1 (en) 2002-09-04

Family

ID=

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