AU2002255530A1 - Ultra low-k dielectric materials - Google Patents

Ultra low-k dielectric materials

Info

Publication number
AU2002255530A1
AU2002255530A1 AU2002255530A AU2002255530A AU2002255530A1 AU 2002255530 A1 AU2002255530 A1 AU 2002255530A1 AU 2002255530 A AU2002255530 A AU 2002255530A AU 2002255530 A AU2002255530 A AU 2002255530A AU 2002255530 A1 AU2002255530 A1 AU 2002255530A1
Authority
AU
Australia
Prior art keywords
dielectric materials
ultra low
ultra
low
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002255530A
Inventor
Ian J. Ball
Qin Jang
Yuwen Shi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chemat Technology Inc
Original Assignee
Chemat Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chemat Technology Inc filed Critical Chemat Technology Inc
Publication of AU2002255530A1 publication Critical patent/AU2002255530A1/en
Abandoned legal-status Critical Current

Links

AU2002255530A 2001-02-12 2002-02-11 Ultra low-k dielectric materials Abandoned AU2002255530A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/267,921 2001-02-12
US10/071,134 2002-02-08

Publications (1)

Publication Number Publication Date
AU2002255530A1 true AU2002255530A1 (en) 2002-08-28

Family

ID=

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