AU2002255306A1 - Optical characteristic measuring method, exposure method, and device manufacturing method - Google Patents

Optical characteristic measuring method, exposure method, and device manufacturing method

Info

Publication number
AU2002255306A1
AU2002255306A1 AU2002255306A AU2002255306A AU2002255306A1 AU 2002255306 A1 AU2002255306 A1 AU 2002255306A1 AU 2002255306 A AU2002255306 A AU 2002255306A AU 2002255306 A AU2002255306 A AU 2002255306A AU 2002255306 A1 AU2002255306 A1 AU 2002255306A1
Authority
AU
Australia
Prior art keywords
device manufacturing
optical characteristic
characteristic measuring
exposure
measuring method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002255306A
Inventor
Takashi Mikuchi
Kazuyuki Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002255306A1 publication Critical patent/AU2002255306A1/en
Abandoned legal-status Critical Current

Links

AU2002255306A 2001-05-07 2002-05-07 Optical characteristic measuring method, exposure method, and device manufacturing method Abandoned AU2002255306A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-135779 2001-05-07
JP2002-31902 2002-02-08
JP2002-31916 2002-02-08

Publications (1)

Publication Number Publication Date
AU2002255306A1 true AU2002255306A1 (en) 2002-11-18

Family

ID=

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