AU2002252913A1 - Actuating and sensing device for scanning probe microscopes - Google Patents

Actuating and sensing device for scanning probe microscopes

Info

Publication number
AU2002252913A1
AU2002252913A1 AU2002252913A AU2002252913A AU2002252913A1 AU 2002252913 A1 AU2002252913 A1 AU 2002252913A1 AU 2002252913 A AU2002252913 A AU 2002252913A AU 2002252913 A AU2002252913 A AU 2002252913A AU 2002252913 A1 AU2002252913 A1 AU 2002252913A1
Authority
AU
Australia
Prior art keywords
actuating
sensing device
scanning probe
probe microscopes
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002252913A
Inventor
Terunobu Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut de Microtechnique-Universite de Neuchatel (IMT)
Original Assignee
Institut de Microtechnique-Universite de Neuchatel (IMT)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut de Microtechnique-Universite de Neuchatel (IMT) filed Critical Institut de Microtechnique-Universite de Neuchatel (IMT)
Publication of AU2002252913A1 publication Critical patent/AU2002252913A1/en
Abandoned legal-status Critical Current

Links

AU2002252913A 2001-05-11 2002-04-15 Actuating and sensing device for scanning probe microscopes Abandoned AU2002252913A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01810460.4 2001-05-11

Publications (1)

Publication Number Publication Date
AU2002252913A1 true AU2002252913A1 (en) 2002-11-25

Family

ID=

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