AU2002251912A1 - Semiconductor structure and device including a carbon film - Google Patents

Semiconductor structure and device including a carbon film

Info

Publication number
AU2002251912A1
AU2002251912A1 AU2002251912A AU2002251912A AU2002251912A1 AU 2002251912 A1 AU2002251912 A1 AU 2002251912A1 AU 2002251912 A AU2002251912 A AU 2002251912A AU 2002251912 A AU2002251912 A AU 2002251912A AU 2002251912 A1 AU2002251912 A1 AU 2002251912A1
Authority
AU
Australia
Prior art keywords
device including
semiconductor structure
carbon film
carbon
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002251912A
Inventor
Lyndee L. Hilt
Jamal Ramdani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2002251912A1 publication Critical patent/AU2002251912A1/en
Abandoned legal-status Critical Current

Links

AU2002251912A 2001-04-02 2002-02-06 Semiconductor structure and device including a carbon film Abandoned AU2002251912A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/824,615 2001-04-02

Publications (1)

Publication Number Publication Date
AU2002251912A1 true AU2002251912A1 (en) 2002-10-21

Family

ID=

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