AU2002250325A1 - Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor - Google Patents

Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor

Info

Publication number
AU2002250325A1
AU2002250325A1 AU2002250325A AU2002250325A AU2002250325A1 AU 2002250325 A1 AU2002250325 A1 AU 2002250325A1 AU 2002250325 A AU2002250325 A AU 2002250325A AU 2002250325 A AU2002250325 A AU 2002250325A AU 2002250325 A1 AU2002250325 A1 AU 2002250325A1
Authority
AU
Australia
Prior art keywords
monitoring
mass sensor
resonant mass
oscillatory characteristics
microfabricated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002250325A
Inventor
Kelvin J. Liu
Michael I. Nerenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MOLECULAR REFLECTION
Original Assignee
MOLECULAR REFLECTION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MOLECULAR REFLECTION filed Critical MOLECULAR REFLECTION
Publication of AU2002250325A1 publication Critical patent/AU2002250325A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/017—Doppler techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
AU2002250325A 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor Abandoned AU2002250325A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US81211101A 2001-03-15 2001-03-15
US09/812,111 2001-03-15
PCT/US2002/007765 WO2002075261A2 (en) 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor

Publications (1)

Publication Number Publication Date
AU2002250325A1 true AU2002250325A1 (en) 2002-10-03

Family

ID=25208538

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002250325A Abandoned AU2002250325A1 (en) 2001-03-15 2002-03-15 Method for monitoring the oscillatory characteristics of a microfabricated resonant mass sensor

Country Status (2)

Country Link
AU (1) AU2002250325A1 (en)
WO (1) WO2002075261A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1744379A4 (en) * 2004-04-27 2007-10-24 Ngk Insulators Ltd Elastic body inspection method, inspection device, and dimension prediction program
CN101672692B (en) * 2009-10-14 2011-02-09 大连理工大学 Tuning fork resonance frequency quick measuring method based on virtual instrument
DE102011100252A1 (en) * 2011-05-03 2012-11-08 Polytec Gmbh Method and device for optical, non-contact vibration measurement of a vibrating object
GB2492841A (en) * 2011-07-15 2013-01-16 Secr Defence Laser photoacoustic spectroscopy using a plurality of tuneable lasers
US11464487B2 (en) 2017-06-30 2022-10-11 Washington University Systems and methods for detecting embedded target elements using signal interference
CN109799191B (en) * 2017-11-17 2021-07-06 南京理工大学 Optical non-contact detection device and method for sound disturbance of rough surface of solid material
DE102019106762A1 (en) * 2018-12-21 2020-06-25 Endress + Hauser Flowtec Ag Method for determining a physical parameter of a liquid loaded with gas

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US5146289A (en) * 1990-12-21 1992-09-08 Laser Technology, Inc. Nondestructive testing using air-coupled acoustic excitation
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US5912181A (en) * 1997-12-23 1999-06-15 Petcavich; Robert J. Method for molecule detection utilizing digital micromirror technology

Also Published As

Publication number Publication date
WO2002075261A3 (en) 2002-12-12
WO2002075261A2 (en) 2002-09-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase