AU2002248710A1 - Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate - Google Patents

Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate

Info

Publication number
AU2002248710A1
AU2002248710A1 AU2002248710A AU2002248710A AU2002248710A1 AU 2002248710 A1 AU2002248710 A1 AU 2002248710A1 AU 2002248710 A AU2002248710 A AU 2002248710A AU 2002248710 A AU2002248710 A AU 2002248710A AU 2002248710 A1 AU2002248710 A1 AU 2002248710A1
Authority
AU
Australia
Prior art keywords
semiconductor substrate
composition containing
corrosion inhibitor
containing copper
inorganic residues
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002248710A
Inventor
David Bernhard
Long Nguyen
Fatima Ma. Seijo
William A. Wojtczak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU2002248710A1 publication Critical patent/AU2002248710A1/en
Abandoned legal-status Critical Current

Links

AU2002248710A 2001-03-27 2002-03-27 Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate Abandoned AU2002248710A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/818,073 2001-03-27

Publications (1)

Publication Number Publication Date
AU2002248710A1 true AU2002248710A1 (en) 2002-10-08

Family

ID=

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