AU2002243405A1 - Electrode configuration for extreme-uv electrical discharge source - Google Patents

Electrode configuration for extreme-uv electrical discharge source

Info

Publication number
AU2002243405A1
AU2002243405A1 AU2002243405A AU2002243405A AU2002243405A1 AU 2002243405 A1 AU2002243405 A1 AU 2002243405A1 AU 2002243405 A AU2002243405 A AU 2002243405A AU 2002243405 A AU2002243405 A AU 2002243405A AU 2002243405 A1 AU2002243405 A1 AU 2002243405A1
Authority
AU
Australia
Prior art keywords
extreme
electrical discharge
electrode configuration
discharge source
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002243405A
Inventor
Jim Jihchyun Chang
Neal R. Fornaciari
Paul A. Spence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUV LLC
Original Assignee
EUV LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EUV LLC filed Critical EUV LLC
Publication of AU2002243405A1 publication Critical patent/AU2002243405A1/en
Abandoned legal-status Critical Current

Links

AU2002243405A 2001-03-13 2001-12-12 Electrode configuration for extreme-uv electrical discharge source Abandoned AU2002243405A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/808,587 2001-03-13

Publications (1)

Publication Number Publication Date
AU2002243405A1 true AU2002243405A1 (en) 2002-09-24

Family

ID=

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