AU2002241545A1 - Automated wafer handling with graphic user interface - Google Patents
Automated wafer handling with graphic user interfaceInfo
- Publication number
- AU2002241545A1 AU2002241545A1 AU2002241545A AU4154502A AU2002241545A1 AU 2002241545 A1 AU2002241545 A1 AU 2002241545A1 AU 2002241545 A AU2002241545 A AU 2002241545A AU 4154502 A AU4154502 A AU 4154502A AU 2002241545 A1 AU2002241545 A1 AU 2002241545A1
- Authority
- AU
- Australia
- Prior art keywords
- user interface
- graphic user
- wafer handling
- automated wafer
- automated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/40—Robotics, robotics mapping to robotics vision
- G05B2219/40099—Graphical user interface for robotics, visual robot user interface
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45032—Wafer manufacture; interlock, load-lock module
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25176600P | 2000-12-07 | 2000-12-07 | |
US60/251,766 | 2000-12-07 | ||
PCT/US2001/045238 WO2002046864A2 (en) | 2000-12-07 | 2001-11-29 | Automated wafer handling with graphic user interface |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002241545A1 true AU2002241545A1 (en) | 2002-06-18 |
Family
ID=22953315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002241545A Abandoned AU2002241545A1 (en) | 2000-12-07 | 2001-11-29 | Automated wafer handling with graphic user interface |
Country Status (3)
Country | Link |
---|---|
US (1) | US20020070983A1 (en) |
AU (1) | AU2002241545A1 (en) |
WO (1) | WO2002046864A2 (en) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8749054B2 (en) | 2010-06-24 | 2014-06-10 | L. Pierre de Rochemont | Semiconductor carrier with vertical power FET module |
EP1419820A1 (en) * | 2002-11-14 | 2004-05-19 | F. Hoffmann-La Roche Ag | Method, system and reaction vessel for processing a biological sample contained in a liquid |
EP1797617A4 (en) | 2004-10-01 | 2009-08-12 | Rochemont L Pierre De | Ceramic antenna module and methods of manufacture thereof |
WO2007005642A2 (en) | 2005-06-30 | 2007-01-11 | Derochemont L Pierre | Electrical components and method of manufacture |
US8821099B2 (en) | 2005-07-11 | 2014-09-02 | Brooks Automation, Inc. | Load port module |
US8354294B2 (en) | 2006-01-24 | 2013-01-15 | De Rochemont L Pierre | Liquid chemical deposition apparatus and process and products therefrom |
US9117859B2 (en) | 2006-08-31 | 2015-08-25 | Brooks Automation, Inc. | Compact processing apparatus |
JP5123690B2 (en) * | 2008-02-27 | 2013-01-23 | キヤノン株式会社 | Screen data processing apparatus, screen data processing method, and computer program |
US7959598B2 (en) | 2008-08-20 | 2011-06-14 | Asante Solutions, Inc. | Infusion pump systems and methods |
US8952858B2 (en) | 2009-06-17 | 2015-02-10 | L. Pierre de Rochemont | Frequency-selective dipole antennas |
US8922347B1 (en) | 2009-06-17 | 2014-12-30 | L. Pierre de Rochemont | R.F. energy collection circuit for wireless devices |
US8552708B2 (en) | 2010-06-02 | 2013-10-08 | L. Pierre de Rochemont | Monolithic DC/DC power management module with surface FET |
US9023493B2 (en) | 2010-07-13 | 2015-05-05 | L. Pierre de Rochemont | Chemically complex ablative max-phase material and method of manufacture |
EP2636069B1 (en) | 2010-11-03 | 2021-07-07 | L. Pierre De Rochemont | Semiconductor chip carriers with monolithically integrated quantum dot devices and method of manufacture thereof |
JP6121832B2 (en) * | 2013-07-29 | 2017-04-26 | 株式会社Screenホールディングス | Substrate processing apparatus, substrate processing method, and substrate processing system |
CN105336642B (en) * | 2014-07-23 | 2018-08-24 | 北京北方华创微电子装备有限公司 | The method and device of semiconductor equipment cavity state display control |
WO2017123525A1 (en) | 2016-01-13 | 2017-07-20 | Bigfoot Biomedical, Inc. | User interface for diabetes management system |
AU2017207484B2 (en) | 2016-01-14 | 2021-05-13 | Bigfoot Biomedical, Inc. | Adjusting insulin delivery rates |
USD874471S1 (en) | 2017-06-08 | 2020-02-04 | Insulet Corporation | Display screen with a graphical user interface |
USD928199S1 (en) | 2018-04-02 | 2021-08-17 | Bigfoot Biomedical, Inc. | Medication delivery device with icons |
US11409276B2 (en) * | 2018-08-17 | 2022-08-09 | Michael Isakov | Method and system for controlling robots within in an interactive arena and generating a virtual overlayed |
USD920343S1 (en) | 2019-01-09 | 2021-05-25 | Bigfoot Biomedical, Inc. | Display screen or portion thereof with graphical user interface associated with insulin delivery |
USD977502S1 (en) | 2020-06-09 | 2023-02-07 | Insulet Corporation | Display screen with graphical user interface |
CN114005768A (en) * | 2021-10-29 | 2022-02-01 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment, tray and wafer box |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6234689B1 (en) * | 1992-04-06 | 2001-05-22 | Hewlett-Packard Co. | Apparatus and method for mapping a custom routine to an interface button |
US5390131A (en) * | 1992-04-06 | 1995-02-14 | Hewlett-Packard Company | Apparatus and method for displaying wafer test results in real time |
US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
WO1996028778A1 (en) * | 1995-03-13 | 1996-09-19 | Knights Technology, Inc. | Automation of tasks using graphical and multimedia macros |
US5761064A (en) * | 1995-10-06 | 1998-06-02 | Advanced Micro Devices, Inc. | Defect management system for productivity and yield improvement |
US5751581A (en) * | 1995-11-13 | 1998-05-12 | Advanced Micro Devices | Material movement server |
JP3784110B2 (en) * | 1996-07-30 | 2006-06-07 | 東京エレクトロン株式会社 | Processing equipment |
US6128588A (en) * | 1997-10-01 | 2000-10-03 | Sony Corporation | Integrated wafer fab time standard (machine tact) database |
US6097887A (en) * | 1997-10-27 | 2000-08-01 | Kla-Tencor Corporation | Software system and method for graphically building customized recipe flowcharts |
US6470227B1 (en) * | 1997-12-02 | 2002-10-22 | Murali D. Rangachari | Method and apparatus for automating a microelectric manufacturing process |
US6122566A (en) * | 1998-03-03 | 2000-09-19 | Applied Materials Inc. | Method and apparatus for sequencing wafers in a multiple chamber, semiconductor wafer processing system |
US6728590B1 (en) * | 1999-07-14 | 2004-04-27 | Nec Electronics, Inc. | Identifying wafer fabrication system impacts resulting from specified actions |
US6560507B1 (en) * | 2000-10-20 | 2003-05-06 | Novellus Systems Inc. | Module classification approach for moving semiconductor wafers in a wafer processing system |
-
2001
- 2001-11-29 AU AU2002241545A patent/AU2002241545A1/en not_active Abandoned
- 2001-11-29 WO PCT/US2001/045238 patent/WO2002046864A2/en not_active Application Discontinuation
- 2001-11-29 US US09/997,940 patent/US20020070983A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2002046864A9 (en) | 2003-04-17 |
WO2002046864A2 (en) | 2002-06-13 |
US20020070983A1 (en) | 2002-06-13 |
WO2002046864A3 (en) | 2002-09-06 |
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