AU2002239024A1 - Neutral particle beam processing apparatus - Google Patents

Neutral particle beam processing apparatus

Info

Publication number
AU2002239024A1
AU2002239024A1 AU2002239024A AU2002239024A AU2002239024A1 AU 2002239024 A1 AU2002239024 A1 AU 2002239024A1 AU 2002239024 A AU2002239024 A AU 2002239024A AU 2002239024 A AU2002239024 A AU 2002239024A AU 2002239024 A1 AU2002239024 A1 AU 2002239024A1
Authority
AU
Australia
Prior art keywords
processing apparatus
particle beam
beam processing
neutral particle
neutral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002239024A
Inventor
Hirokuni Hiyama
Katsunori Ichiki
Seiji Samukawa
Kazuo Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University NUC
Ebara Corp
Original Assignee
Tohoku University NUC
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku University NUC, Ebara Corp filed Critical Tohoku University NUC
Publication of AU2002239024A1 publication Critical patent/AU2002239024A1/en
Abandoned legal-status Critical Current

Links

AU2002239024A 2001-03-26 2002-03-22 Neutral particle beam processing apparatus Abandoned AU2002239024A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-88859 2001-03-26

Publications (1)

Publication Number Publication Date
AU2002239024A1 true AU2002239024A1 (en) 2002-10-08

Family

ID=

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