AU2002234938A1 - Comb piezoelectric actuator, and its manufacturing method - Google Patents

Comb piezoelectric actuator, and its manufacturing method

Info

Publication number
AU2002234938A1
AU2002234938A1 AU2002234938A AU2002234938A AU2002234938A1 AU 2002234938 A1 AU2002234938 A1 AU 2002234938A1 AU 2002234938 A AU2002234938 A AU 2002234938A AU 2002234938 A AU2002234938 A AU 2002234938A AU 2002234938 A1 AU2002234938 A1 AU 2002234938A1
Authority
AU
Australia
Prior art keywords
comb
manufacturing
piezoelectric actuator
piezoelectric
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002234938A
Inventor
Kazumasa Kitamura
Nobuo Takahashi
Yukihisa Takeuchi
Hiroyuki Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of AU2002234938A1 publication Critical patent/AU2002234938A1/en
Abandoned legal-status Critical Current

Links

AU2002234938A 2001-03-01 2002-03-01 Comb piezoelectric actuator, and its manufacturing method Abandoned AU2002234938A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-057011 2001-03-01

Publications (1)

Publication Number Publication Date
AU2002234938A1 true AU2002234938A1 (en) 2002-09-19

Family

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