AU2002307709A1 - Micro piezoelectric actuator and method for fabricating same - Google Patents

Micro piezoelectric actuator and method for fabricating same

Info

Publication number
AU2002307709A1
AU2002307709A1 AU2002307709A AU2002307709A AU2002307709A1 AU 2002307709 A1 AU2002307709 A1 AU 2002307709A1 AU 2002307709 A AU2002307709 A AU 2002307709A AU 2002307709 A AU2002307709 A AU 2002307709A AU 2002307709 A1 AU2002307709 A1 AU 2002307709A1
Authority
AU
Australia
Prior art keywords
piezoelectric actuator
fabricating same
micro piezoelectric
micro
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002307709A
Inventor
Kyu-Ho Hwang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M2N Inc
Original Assignee
M2N Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M2N Inc filed Critical M2N Inc
Publication of AU2002307709A1 publication Critical patent/AU2002307709A1/en
Abandoned legal-status Critical Current

Links

AU2002307709A 2001-04-17 2002-04-17 Micro piezoelectric actuator and method for fabricating same Abandoned AU2002307709A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU2001252719 2001-04-17

Publications (1)

Publication Number Publication Date
AU2002307709A1 true AU2002307709A1 (en) 2002-10-28

Family

ID=

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