AU2002231693A1 - Scanning probe with digitised pulsed-force mode operation and real-time evaluation - Google Patents
Scanning probe with digitised pulsed-force mode operation and real-time evaluationInfo
- Publication number
- AU2002231693A1 AU2002231693A1 AU2002231693A AU3169302A AU2002231693A1 AU 2002231693 A1 AU2002231693 A1 AU 2002231693A1 AU 2002231693 A AU2002231693 A AU 2002231693A AU 3169302 A AU3169302 A AU 3169302A AU 2002231693 A1 AU2002231693 A1 AU 2002231693A1
- Authority
- AU
- Australia
- Prior art keywords
- real
- time
- force
- digitised
- pulsed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000523 sample Substances 0.000 title abstract 6
- 238000011156 evaluation Methods 0.000 title abstract 2
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
- G01Q60/34—Tapping mode
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Tests Of Electronic Circuits (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10062049 | 2000-12-13 | ||
DE10062049A DE10062049A1 (de) | 2000-12-13 | 2000-12-13 | Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop |
PCT/EP2001/014593 WO2002048644A1 (fr) | 2000-12-13 | 2001-12-12 | Procede pour obtenir l'image d'une surface d'echantillon a l'aide d'une sonde de balayage, et microscope-sonde a balayage |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002231693A1 true AU2002231693A1 (en) | 2002-06-24 |
Family
ID=7666954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002231693A Abandoned AU2002231693A1 (en) | 2000-12-13 | 2001-12-12 | Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
Country Status (6)
Country | Link |
---|---|
US (2) | US7129486B2 (fr) |
EP (2) | EP1342049B1 (fr) |
AT (2) | ATE373309T1 (fr) |
AU (1) | AU2002231693A1 (fr) |
DE (3) | DE10062049A1 (fr) |
WO (1) | WO2002048644A1 (fr) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7877816B2 (en) | 2000-12-13 | 2011-01-25 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Scanning probe in pulsed-force mode, digital and in real time |
US6677697B2 (en) * | 2001-12-06 | 2004-01-13 | Veeco Instruments Inc. | Force scanning probe microscope |
WO2004057303A2 (fr) * | 2002-12-18 | 2004-07-08 | Asylum Research Corporation | Unite de commande entierement numerique pour instruments en porte-a-faux |
JP2004264039A (ja) * | 2003-01-30 | 2004-09-24 | Hitachi Ltd | 走査プローブ顕微鏡及びcd・断面プロファイル計測方法並びに半導体デバイス製造方法 |
DE102005041301A1 (de) * | 2005-08-31 | 2007-03-01 | Advanced Micro Devices Inc., Sunnyvale | Verfahren und Vorrichtung zum Bestimmen von Oberflächeneigenschaften unter Anwendung von SPM-Techniken mit akustischer Anregung und Echtzeitdigitalisierung |
EP1938040B1 (fr) * | 2005-09-29 | 2018-11-21 | Bruker Nano, Inc. | Procede et appareil de cartographie d'une propriete a haute vitesse |
WO2007059833A1 (fr) * | 2005-11-22 | 2007-05-31 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Microscope, notamment microscope electronique a sonde de balayage, comportant une logique programmable |
US7555940B2 (en) * | 2006-07-25 | 2009-07-07 | Veeco Instruments, Inc. | Cantilever free-decay measurement system with coherent averaging |
US20090139313A1 (en) * | 2007-12-03 | 2009-06-04 | David Patrick Fromm | Time-Tagged Data for Atomic Force Microscopy |
US8719960B2 (en) | 2008-01-31 | 2014-05-06 | The Board Of Trustees Of The University Of Illinois | Temperature-dependent nanoscale contact potential measurement technique and device |
WO2010022285A1 (fr) | 2008-08-20 | 2010-02-25 | The Board Of Trustees Of The University Of Illinois | Dispositif de mesure calorimétrique |
US8650660B2 (en) | 2008-11-13 | 2014-02-11 | Bruker Nano, Inc. | Method and apparatus of using peak force tapping mode to measure physical properties of a sample |
WO2010057052A2 (fr) * | 2008-11-13 | 2010-05-20 | Veeco Instruments Inc. | Procédé et appareil d'utilisation d'un microscope en champ proche |
US8955161B2 (en) | 2008-11-13 | 2015-02-10 | Bruker Nano, Inc. | Peakforce photothermal-based detection of IR nanoabsorption |
DE102009015945A1 (de) | 2009-01-26 | 2010-07-29 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Vorrichtung und Verfahren zur Abbildung der Oberfläche einer Probe |
US8387443B2 (en) | 2009-09-11 | 2013-03-05 | The Board Of Trustees Of The University Of Illinois | Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer |
SG181154A1 (en) * | 2009-12-01 | 2012-07-30 | Bruker Nano Inc | Method and apparatus of operating a scanning probe microscope |
US8342867B2 (en) * | 2009-12-01 | 2013-01-01 | Raytheon Company | Free floating connector engagement and retention system and method for establishing a temporary electrical connection |
DE102010015428B4 (de) | 2010-04-19 | 2015-07-30 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Verfahren und Vorrichtung zur Abbildung einer Probenoberfläche |
DE202010010932U1 (de) | 2010-04-19 | 2011-10-07 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Vorrichtung zur Abbildung einer Probenoberfläche |
US8914911B2 (en) | 2011-08-15 | 2014-12-16 | The Board Of Trustees Of The University Of Illinois | Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy |
US8533861B2 (en) | 2011-08-15 | 2013-09-10 | The Board Of Trustees Of The University Of Illinois | Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy |
US9110092B1 (en) * | 2013-04-09 | 2015-08-18 | NT-MDT Development Inc. | Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode |
US9383388B2 (en) | 2014-04-21 | 2016-07-05 | Oxford Instruments Asylum Research, Inc | Automated atomic force microscope and the operation thereof |
US11366455B2 (en) | 2016-05-09 | 2022-06-21 | Strong Force Iot Portfolio 2016, Llc | Methods and systems for optimization of data collection and storage using 3rd party data from a data marketplace in an industrial internet of things environment |
US11327475B2 (en) | 2016-05-09 | 2022-05-10 | Strong Force Iot Portfolio 2016, Llc | Methods and systems for intelligent collection and analysis of vehicle data |
US11774944B2 (en) | 2016-05-09 | 2023-10-03 | Strong Force Iot Portfolio 2016, Llc | Methods and systems for the industrial internet of things |
KR102457857B1 (ko) | 2016-08-22 | 2022-10-24 | 브루커 나노, 아이엔씨. | 진동 모드를 이용한 샘플의 적외선 특성 |
DE102016221319A1 (de) | 2016-10-28 | 2018-05-03 | Carl Zeiss Smt Gmbh | Rastersondenmikroskop und Verfahren zum Erhöhen einer Abtastgeschwindigkeit eines Rastersondenmikroskops im Step-in Abtastmodus |
EP3538941A4 (fr) | 2016-11-10 | 2020-06-17 | The Trustees of Columbia University in the City of New York | Procédés d'imagerie rapide de grands échantillons à haute résolution |
CN112567252B (zh) * | 2018-08-09 | 2024-03-08 | 株式会社岛津制作所 | 扫描探针显微镜以及使用扫描探针显微镜的物理性质测定方法 |
DE102020008092A1 (de) | 2020-08-13 | 2022-02-17 | Carl Zeiss Smt Gmbh | Vorrichtung und verfahren zum betreiben eines biegebalkens in einer geschlossenen regelschleife |
DE102020210290B3 (de) | 2020-08-13 | 2021-11-18 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zum Betreiben eines Biegebalkens in einer geschlossenen Regelschleife |
DE102020008233B4 (de) | 2020-08-13 | 2024-08-22 | Carl Zeiss Smt Gmbh | Vorrichtung und verfahren zum betreiben eines biegebalkens in einer geschlossenen regelschleife |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5224376A (en) * | 1989-12-08 | 1993-07-06 | Digital Instruments, Inc. | Atomic force microscope |
US5412980A (en) * | 1992-08-07 | 1995-05-09 | Digital Instruments, Inc. | Tapping atomic force microscope |
US5519212A (en) * | 1992-08-07 | 1996-05-21 | Digital Instruments, Incorporated | Tapping atomic force microscope with phase or frequency detection |
JPH07113741A (ja) * | 1993-10-18 | 1995-05-02 | Ryoden Semiconductor Syst Eng Kk | 付着力測定装置、付着力測定方法及び半導体装置の製造方法 |
WO1996028837A1 (fr) * | 1995-03-10 | 1996-09-19 | Molecular Imaging Corporation | Systeme de controle hybride pour microscope a sonde d'exploration |
US20030022033A1 (en) * | 1997-03-15 | 2003-01-30 | Mannesmann Ag | Fuel cell with pulsed anode potential |
DE19728357C2 (de) | 1997-07-03 | 2001-09-27 | Martin Munz | Vorrichtung und Verfahren in der kontaktierenden Rasterkraftmikroskopie mit periodischer Modulation der Auflagekraft zur Messung der lokalen elastischen und anelastischen Eigenschaften von Oberflächen unter Konstanthaltung der Deformation im Kontaktbereich von Meßsonde und Probenoberfläche |
DE19900114B4 (de) * | 1999-01-05 | 2005-07-28 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Verfahren und Vorrichtung zur gleichzeitigen Bestimmung zumindest zweier Materialeigenschaften einer Probenoberfläche, umfassend die Adhäsion, die Reibung, die Oberflächentopographie sowie die Elastizität und Steifigkeit |
DE10024404A1 (de) * | 2000-05-19 | 2001-11-22 | Leica Microsystems | Verfahren und Vorrichtung zum Abtasten eines Objekts |
US20020072893A1 (en) * | 2000-10-12 | 2002-06-13 | Alex Wilson | System, method and article of manufacture for using a microprocessor emulation in a hardware application with non time-critical functions |
US7877816B2 (en) * | 2000-12-13 | 2011-01-25 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Scanning probe in pulsed-force mode, digital and in real time |
-
2000
- 2000-12-13 DE DE10062049A patent/DE10062049A1/de not_active Ceased
-
2001
- 2001-12-12 WO PCT/EP2001/014593 patent/WO2002048644A1/fr not_active Application Discontinuation
- 2001-12-12 EP EP01991830A patent/EP1342049B1/fr not_active Expired - Lifetime
- 2001-12-12 DE DE50113020T patent/DE50113020D1/de not_active Expired - Lifetime
- 2001-12-12 EP EP05021681A patent/EP1640996B1/fr not_active Expired - Lifetime
- 2001-12-12 DE DE50107636T patent/DE50107636D1/de not_active Expired - Lifetime
- 2001-12-12 AT AT05021681T patent/ATE373309T1/de not_active IP Right Cessation
- 2001-12-12 AT AT01991830T patent/ATE306068T1/de not_active IP Right Cessation
- 2001-12-12 US US10/433,917 patent/US7129486B2/en not_active Expired - Lifetime
- 2001-12-12 AU AU2002231693A patent/AU2002231693A1/en not_active Abandoned
-
2010
- 2010-07-14 US US12/804,110 patent/US8286261B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1342049A1 (fr) | 2003-09-10 |
ATE306068T1 (de) | 2005-10-15 |
EP1342049B1 (fr) | 2005-10-05 |
DE10062049A1 (de) | 2002-06-27 |
US20100313311A1 (en) | 2010-12-09 |
DE50113020D1 (de) | 2007-10-25 |
EP1640996B1 (fr) | 2007-09-12 |
WO2002048644A1 (fr) | 2002-06-20 |
EP1640996A2 (fr) | 2006-03-29 |
US8286261B2 (en) | 2012-10-09 |
DE50107636D1 (de) | 2006-02-16 |
EP1640996A3 (fr) | 2006-05-10 |
ATE373309T1 (de) | 2007-09-15 |
US20040084618A1 (en) | 2004-05-06 |
US7129486B2 (en) | 2006-10-31 |
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