AU2002230566A1 - Seal for process tube - Google Patents

Seal for process tube

Info

Publication number
AU2002230566A1
AU2002230566A1 AU2002230566A AU3056602A AU2002230566A1 AU 2002230566 A1 AU2002230566 A1 AU 2002230566A1 AU 2002230566 A AU2002230566 A AU 2002230566A AU 3056602 A AU3056602 A AU 3056602A AU 2002230566 A1 AU2002230566 A1 AU 2002230566A1
Authority
AU
Australia
Prior art keywords
seal
process tube
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002230566A
Inventor
Steven T. Fink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002230566A1 publication Critical patent/AU2002230566A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/004—Sealings comprising at least two sealings in succession forming of recuperation chamber for the leaking fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L17/00—Joints with packing adapted to sealing by fluid pressure
    • F16L17/06—Joints with packing adapted to sealing by fluid pressure with sealing rings arranged between the end surfaces of the pipes or flanges or arranged in recesses in the pipe ends or flanges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F16L39/005—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies for concentric pipes
AU2002230566A 2000-12-19 2001-12-19 Seal for process tube Abandoned AU2002230566A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25633000P 2000-12-19 2000-12-19
US60/256,330 2000-12-19
PCT/US2001/045860 WO2002050463A2 (en) 2000-12-19 2001-12-19 Seal for process tube

Publications (1)

Publication Number Publication Date
AU2002230566A1 true AU2002230566A1 (en) 2002-07-01

Family

ID=22971842

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002230566A Abandoned AU2002230566A1 (en) 2000-12-19 2001-12-19 Seal for process tube

Country Status (3)

Country Link
US (1) US6942222B2 (en)
AU (1) AU2002230566A1 (en)
WO (1) WO2002050463A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006001582B4 (en) * 2005-06-14 2017-12-07 Parker-Hannifin Corp. Seal assembly and fluid coupling
JP5351655B2 (en) * 2009-08-19 2013-11-27 アズビル株式会社 Electromagnetic flow meter
US9349621B2 (en) * 2011-05-23 2016-05-24 Lam Research Corporation Vacuum seal arrangement useful in plasma processing chamber
EP2722566B1 (en) * 2012-10-19 2015-05-13 Fei Company Coated O-ring
DE102014103591A1 (en) * 2014-03-17 2015-09-17 Stefan Lück sealing system
JP7205722B2 (en) * 2019-03-20 2023-01-17 株式会社オンダ製作所 pipe joint
US20220148685A1 (en) 2020-11-09 2022-05-12 X Development Llc Free energy landscape modeling with parallel paths

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2532891A (en) * 1948-09-23 1950-12-05 Warren W Chupp Flanged joint sealing gasket
US2900199A (en) * 1953-04-20 1959-08-18 Gen Electric Pipe seal
GB1280712A (en) 1969-10-25 1972-07-05 Glenfield & Kennedy Ltd Improvements in or relating to sealing devices
US4081083A (en) * 1976-09-03 1978-03-28 Dresser Industries, Inc. Automatic subway coupler
CH640922A5 (en) * 1979-10-22 1984-01-31 Balzers Hochvakuum GASKET FOR VACUUM FLANGE CONNECTIONS.
US4410186A (en) * 1982-04-12 1983-10-18 Petroleum Designers, Inc. Sealing system for pressurized flanged joints
JPS6097622A (en) * 1983-11-01 1985-05-31 Toshiba Mach Co Ltd Epitaxial device
DE19618766A1 (en) 1996-05-10 1997-11-13 Leybold Systems Gmbh Arrangement for shielding high-frequency electromagnetic radiation
ATE343078T1 (en) * 1998-08-21 2006-11-15 Advanced Products Company COMPRESSION SPRING SEAL

Also Published As

Publication number Publication date
WO2002050463A3 (en) 2003-02-20
WO2002050463A2 (en) 2002-06-27
US6942222B2 (en) 2005-09-13
US20040080120A1 (en) 2004-04-29

Similar Documents

Publication Publication Date Title
AU2001287983A1 (en) Seal system
AU2001291561A1 (en) External pipe welding apparatus
AU2002213160A1 (en) Tube sealing assembly
AU5641901A (en) Sealing tip for tubular conduit
AU2001295758A1 (en) Seal
AU2002230470A1 (en) Process for preparing pouches
AU2001244470A1 (en) Assembly process
AU2001282062A1 (en) Sealing system
AU2001291313A1 (en) Process for making 3-amino-2-chloro-4-methylpyridine
AU2002364244A1 (en) Waterguard tube
AU2002230566A1 (en) Seal for process tube
AU2001220281A1 (en) Rollerboard for road-skiing
AU5091000A (en) Sealing apparatus
AU2001290623A1 (en) Interbank process
AU2002218440A1 (en) New process
AU2001233188A1 (en) Improved crimp seal for absorbent articles
AU3970700A (en) Tube valve
AU2001267769A1 (en) Process
AU2002220757A1 (en) Method for obtaining azaerythromycin
AU5028201A (en) Seal arrangement
AU2001264117A1 (en) Chemical process
AU2002220565A1 (en) Sealing collar
AU2001272594A1 (en) Sealing arrangement
AU2001284442A1 (en) Process for producing fluoroalkanol
AUPR144100A0 (en) Process for can manufacture