Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002230100A
Inventor
Takao Abe
Hiroyuki Ohtsuka
Satoyuki Ojima
Masatoshi Takahashi
Takenori Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Shin Etsu Handotai Co LtdfiledCriticalShin Etsu Chemical Co Ltd
Publication of AU2002230100A1publicationCriticalpatent/AU2002230100A1/en