AU2002223837A1 - Radio frequency ion source - Google Patents

Radio frequency ion source

Info

Publication number
AU2002223837A1
AU2002223837A1 AU2002223837A AU2383702A AU2002223837A1 AU 2002223837 A1 AU2002223837 A1 AU 2002223837A1 AU 2002223837 A AU2002223837 A AU 2002223837A AU 2383702 A AU2383702 A AU 2383702A AU 2002223837 A1 AU2002223837 A1 AU 2002223837A1
Authority
AU
Australia
Prior art keywords
radio frequency
ion source
frequency ion
source
radio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002223837A
Inventor
Stuart Neville Cairns
Marian Lesley Langford
Andrew John Marr
Ian Blair Pleasants
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of AU2002223837A1 publication Critical patent/AU2002223837A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
AU2002223837A 2000-11-24 2001-11-21 Radio frequency ion source Abandoned AU2002223837A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0028682A GB2369487A (en) 2000-11-24 2000-11-24 Radio frequency ion source
GB0028682.3 2000-11-24
PCT/GB2001/005104 WO2002043100A2 (en) 2000-11-24 2001-11-21 Radio frequency ion source

Publications (1)

Publication Number Publication Date
AU2002223837A1 true AU2002223837A1 (en) 2002-06-03

Family

ID=9903812

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002223837A Abandoned AU2002223837A1 (en) 2000-11-24 2001-11-21 Radio frequency ion source

Country Status (9)

Country Link
US (1) US6906469B2 (en)
EP (1) EP1336187A2 (en)
JP (1) JP2004515037A (en)
KR (1) KR20040012684A (en)
CN (1) CN1529898A (en)
AU (1) AU2002223837A1 (en)
CA (1) CA2429737A1 (en)
GB (2) GB2369487A (en)
WO (1) WO2002043100A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10019257C2 (en) * 2000-04-15 2003-11-06 Leibniz Inst Fuer Festkoerper Glow discharge source for elemental analysis
GB0508239D0 (en) 2005-04-23 2005-06-01 Smiths Group Plc Detection apparatus
GB0707254D0 (en) * 2007-04-14 2007-05-23 Smiths Detection Watford Ltd Detectors and ion sources
US7709787B2 (en) * 2007-08-24 2010-05-04 The United States Of America As Represented By The Secretary Of The Department Of Commerce Stepped electric field detector
JP5282059B2 (en) * 2010-03-15 2013-09-04 株式会社日立ハイテクノロジーズ Ion molecule reaction ionization mass spectrometer and analysis method
CA2884457A1 (en) * 2012-09-13 2014-03-20 University Of Maine System Board Of Trustees Radio-frequency ionization in mass spectrometry
CN103928287A (en) * 2014-04-17 2014-07-16 桂林电子科技大学 Ion source and air pump integration device and application thereof
CN106158573B (en) * 2015-03-31 2017-11-14 合肥美亚光电技术股份有限公司 A kind of sample introduction ionizing system for mass spectrometer
CN107464735A (en) * 2017-06-28 2017-12-12 中国地质科学院水文地质环境地质研究所 A kind of new chlorine bromine isotope mass spectrometer and its analysis method
CN111739783B (en) * 2020-05-28 2021-10-29 清华大学 Atmospheric pressure electric arc ion source for small mass spectrometer and detection method thereof

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB420360A (en) 1933-03-20 1934-11-20 Constantin Prodromos Yaglou Improvements in or relating to the ionising of gases, more particularly applicable to conditioning air for ventilation
US4092543A (en) 1976-09-13 1978-05-30 The Simco Company, Inc. Electrostatic neutralizer with balanced ion emission
DE3134337A1 (en) * 1981-08-31 1983-03-24 Technics GmbH Europa, 8011 Kirchheim ION RAY CANNON
US4630566A (en) * 1984-08-16 1986-12-23 Board Of Trustees Operating Michigan State University Microwave or UHF plasma improved apparatus
JPS63206484A (en) * 1987-02-20 1988-08-25 Nec Corp Reactive ion etching device
JPH01244619A (en) * 1988-03-25 1989-09-29 Mitsubishi Electric Corp Plasma dry etching process
IL103963A (en) * 1991-12-03 1996-03-31 Graseby Dynamics Ltd Corona discharge ionization source
US5444258A (en) * 1992-08-24 1995-08-22 Societe Europeenne De Propulsion Ion-optics system for a source of ions to be discharged into a gas
US5849372A (en) * 1993-09-17 1998-12-15 Isis Innovation Limited RF plasma reactor and methods of generating RF plasma
GB2296369A (en) * 1994-12-22 1996-06-26 Secr Defence Radio frequency ion source
JPH08306499A (en) * 1995-04-28 1996-11-22 Kazuo Terajima High voltage environmental micro-electrode-gap plasma generator
JP5358050B2 (en) * 1998-06-26 2013-12-04 出光興産株式会社 Light emitting device
US6407382B1 (en) * 1999-06-04 2002-06-18 Technispan Llc Discharge ionization source
AU5458100A (en) * 1999-06-04 2000-12-28 Technispan Llc Discharge ionization source
TW483287B (en) * 1999-06-21 2002-04-11 Semiconductor Energy Lab EL display device, driving method thereof, and electronic equipment provided with the EL display device

Also Published As

Publication number Publication date
US20040032211A1 (en) 2004-02-19
WO2002043100A3 (en) 2002-08-15
GB0028682D0 (en) 2001-01-10
CN1529898A (en) 2004-09-15
KR20040012684A (en) 2004-02-11
WO2002043100A2 (en) 2002-05-30
EP1336187A2 (en) 2003-08-20
JP2004515037A (en) 2004-05-20
US6906469B2 (en) 2005-06-14
GB2369487A (en) 2002-05-29
GB0311624D0 (en) 2003-06-25
CA2429737A1 (en) 2002-05-30
GB2389456A (en) 2003-12-10
GB2389456A8 (en) 2003-12-16
GB2389456B (en) 2005-04-06

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