AU2002216615A1 - In-situ thickness and refractive index monitoring and control system for thin film deposition - Google Patents
In-situ thickness and refractive index monitoring and control system for thin film depositionInfo
- Publication number
- AU2002216615A1 AU2002216615A1 AU2002216615A AU1661502A AU2002216615A1 AU 2002216615 A1 AU2002216615 A1 AU 2002216615A1 AU 2002216615 A AU2002216615 A AU 2002216615A AU 1661502 A AU1661502 A AU 1661502A AU 2002216615 A1 AU2002216615 A1 AU 2002216615A1
- Authority
- AU
- Australia
- Prior art keywords
- thin film
- control system
- refractive index
- film deposition
- index monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/4133—Refractometers, e.g. differential
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Mathematical Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23799900P | 2000-10-05 | 2000-10-05 | |
US60/237,999 | 2000-10-05 | ||
PCT/US2001/031026 WO2002029358A1 (en) | 2000-10-05 | 2001-10-04 | In-situ thickness and refractive index monitoring and control system for thin film deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002216615A1 true AU2002216615A1 (en) | 2002-04-15 |
Family
ID=22896064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002216615A Abandoned AU2002216615A1 (en) | 2000-10-05 | 2001-10-04 | In-situ thickness and refractive index monitoring and control system for thin film deposition |
Country Status (4)
Country | Link |
---|---|
US (1) | US6646753B2 (en) |
EP (1) | EP1322908A1 (en) |
AU (1) | AU2002216615A1 (en) |
WO (1) | WO2002029358A1 (en) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10150131C2 (en) * | 2001-10-11 | 2003-10-09 | Bruker Biospin Ag Faellanden | RF receiver coil arrangement for an NMR resonator with macroscopically homogeneous distribution of the conductor structures |
KR20030054157A (en) * | 2001-12-24 | 2003-07-02 | 엘지엔시스(주) | Sensing apparatus for thickness of transit body |
US20040046969A1 (en) * | 2002-09-10 | 2004-03-11 | Honeywell International Inc. | System and method for monitoring thin film deposition on optical substrates |
US6879744B2 (en) * | 2003-01-07 | 2005-04-12 | Georgi A. Atanasov | Optical monitoring of thin film deposition |
WO2005008272A2 (en) * | 2003-07-11 | 2005-01-27 | Blue View Technologies, Inc. | Systems and methods implementing frequency-steered acoutic arrays for 2d and 3d imaging |
US9206500B2 (en) * | 2003-08-11 | 2015-12-08 | Boris Druz | Method and apparatus for surface processing of a substrate using an energetic particle beam |
US20050220984A1 (en) * | 2004-04-02 | 2005-10-06 | Applied Materials Inc., A Delaware Corporation | Method and system for control of processing conditions in plasma processing systems |
WO2006017782A1 (en) * | 2004-08-05 | 2006-02-16 | Acton Reserch Corporation | A self-referencing instrument and method thereof for measuring electromagnetic properties |
US20060054494A1 (en) * | 2004-09-16 | 2006-03-16 | Veeco Instruments Inc. | Physical vapor deposition apparatus for depositing thin multilayer films and methods of depositing such films |
CN1320352C (en) * | 2004-11-18 | 2007-06-06 | 上海交通大学 | Method for simultaneously measuring refractive index and thickness of polymer film using precision reflectometer |
US7277819B2 (en) * | 2005-10-31 | 2007-10-02 | Eastman Kodak Company | Measuring layer thickness or composition changes |
US8248606B1 (en) * | 2008-09-15 | 2012-08-21 | J.A. Woollam Co., Inc. | Sample mapping in environmental chamber |
WO2015005905A1 (en) | 2013-07-09 | 2015-01-15 | Halliburton Energy Services, Inc. | Integrated computational elements with laterally-distributed spectral filters |
BR112015029784A2 (en) | 2013-07-09 | 2017-07-25 | Halliburton Energy Services Inc | system, measuring tool and method |
US9395721B2 (en) | 2013-12-24 | 2016-07-19 | Halliburton Energy Services, Inc. | In-situ monitoring of fabrication of integrated computational elements |
WO2015099707A1 (en) | 2013-12-24 | 2015-07-02 | Halliburton Energy Services, Inc. | Fabrication of critical layers of integrated computational elements |
WO2015099709A1 (en) | 2013-12-24 | 2015-07-02 | Halliburton Energy Services, Inc. | Real-time monitoring of fabrication of integrated computational elements |
EP2909763A4 (en) | 2013-12-24 | 2015-12-23 | Halliburton Energy Services Inc | Adjusting fabrication of integrated computational elements |
US11274365B2 (en) | 2013-12-30 | 2022-03-15 | Halliburton Energy Services, Inc. | Determining temperature dependence of complex refractive indices of layer materials during fabrication of integrated computational elements |
BR112016011904A2 (en) | 2013-12-31 | 2017-08-08 | Halliburton Energy Services Inc | MANUFACTURE SYSTEM OF AN INTEGRATED COMPUTATIONAL ELEMENT |
EP2946197A4 (en) | 2014-02-14 | 2016-12-21 | Halliburton Energy Services Inc | In-situ spectroscopy for monitoring fabrication of integrated computational elements |
EP2943774A4 (en) | 2014-03-21 | 2016-05-11 | Halliburton Energy Services Inc | Monolithic band-limited integrated computational elements |
US9708908B2 (en) | 2014-06-13 | 2017-07-18 | Halliburton Energy Services, Inc. | Integrated computational element with multiple frequency selective surfaces |
WO2016003401A1 (en) | 2014-06-30 | 2016-01-07 | Halliburton Energy Services, Inc. | Deposition of integrated computational elements (ice) using a translation stage |
WO2020142451A1 (en) * | 2018-12-31 | 2020-07-09 | Lam Research Corporation | Monitoring process wall depositions and coatings |
DE102020109742B4 (en) * | 2020-04-07 | 2022-02-03 | Hochschule Düsseldorf Körperschaft des öffentlichen Rechts | Method and device for determining frequency-dependent refractive indices |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4878755A (en) | 1986-03-29 | 1989-11-07 | Leybold Aktiengesellschaft | Process and device for measuring the optical properties of thin layers |
US4748329A (en) | 1987-02-17 | 1988-05-31 | Canadian Patents And Development Ltd. | Method for on-line thickness monitoring of a transparent film |
JPH0518896A (en) | 1990-02-22 | 1993-01-26 | Heinrich Hertz Inst Nachrichtentech Berlin Gmbh | Measuring method for detecting small quantity of extinction |
JPH06222005A (en) * | 1993-01-28 | 1994-08-12 | Seiko Instr Inc | Icp emission spectroscopic analysis |
JP3491337B2 (en) | 1994-05-13 | 2004-01-26 | 株式会社デンソー | Semiconductor thickness non-contact measuring device |
US5798837A (en) * | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
US6039806A (en) | 1998-04-20 | 2000-03-21 | E-Tek Dynamics, Inc. | Precision thickness optical coating system and method of operation thereof |
-
2001
- 2001-10-04 AU AU2002216615A patent/AU2002216615A1/en not_active Abandoned
- 2001-10-04 WO PCT/US2001/031026 patent/WO2002029358A1/en not_active Application Discontinuation
- 2001-10-04 US US09/971,374 patent/US6646753B2/en not_active Expired - Fee Related
- 2001-10-04 EP EP01986342A patent/EP1322908A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US6646753B2 (en) | 2003-11-11 |
US20020075486A1 (en) | 2002-06-20 |
EP1322908A1 (en) | 2003-07-02 |
WO2002029358A1 (en) | 2002-04-11 |
WO2002029358A9 (en) | 2002-10-17 |
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