AU2001291016A1 - Polishing pad comprising particulate polymer and crosslinked polymer binder - Google Patents

Polishing pad comprising particulate polymer and crosslinked polymer binder

Info

Publication number
AU2001291016A1
AU2001291016A1 AU2001291016A AU9101601A AU2001291016A1 AU 2001291016 A1 AU2001291016 A1 AU 2001291016A1 AU 2001291016 A AU2001291016 A AU 2001291016A AU 9101601 A AU9101601 A AU 9101601A AU 2001291016 A1 AU2001291016 A1 AU 2001291016A1
Authority
AU
Australia
Prior art keywords
particulate
crosslinked
polymer
polishing pad
binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001291016A
Inventor
Robert G. Swisher
Alan E Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Ohio Inc
Original Assignee
PPG Industries Ohio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Ohio Inc filed Critical PPG Industries Ohio Inc
Publication of AU2001291016A1 publication Critical patent/AU2001291016A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/12—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of felted or spongy material, e.g. felt, steel wool, foamed latex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

A polishing pad is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer (e.g., particulate crosslinked polyurethane and/or particulate crosslinked polyepoxide) and mixtures thereof; and (b) crosslinked organic polymer binder (e.g., crosslinked polyurethane binder and/or crosslinked polyepoxide binder), which binds the particulate polymer together. The particulate polymer and crosslinked organic polymer binder are distributed substantially uniformly throughout the polishing pad, and the pad has a percent pore volume of from 2 percent by volume to 50 percent by volume, based on the total volume of said polishing pad. Polishing pad assemblies are also described.
AU2001291016A 2000-09-15 2001-09-14 Polishing pad comprising particulate polymer and crosslinked polymer binder Abandoned AU2001291016A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09663180 2000-09-15
US09/663,180 US6477926B1 (en) 2000-09-15 2000-09-15 Polishing pad
PCT/US2001/028948 WO2002022309A1 (en) 2000-09-15 2001-09-14 Polishing pad comprising particulate polymer and crosslinked polymer binder

Publications (1)

Publication Number Publication Date
AU2001291016A1 true AU2001291016A1 (en) 2002-03-26

Family

ID=24660789

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001291016A Abandoned AU2001291016A1 (en) 2000-09-15 2001-09-14 Polishing pad comprising particulate polymer and crosslinked polymer binder

Country Status (8)

Country Link
US (1) US6477926B1 (en)
EP (1) EP1318891B1 (en)
CN (1) CN100346930C (en)
AT (1) ATE293516T1 (en)
AU (1) AU2001291016A1 (en)
DE (1) DE60110248T2 (en)
TW (1) TW550165B (en)
WO (1) WO2002022309A1 (en)

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US9278424B2 (en) 2003-03-25 2016-03-08 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
US8864859B2 (en) 2003-03-25 2014-10-21 Nexplanar Corporation Customized polishing pads for CMP and methods of fabrication and use thereof
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US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
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Also Published As

Publication number Publication date
US6477926B1 (en) 2002-11-12
EP1318891A1 (en) 2003-06-18
DE60110248D1 (en) 2005-05-25
ATE293516T1 (en) 2005-05-15
CN100346930C (en) 2007-11-07
DE60110248T2 (en) 2006-03-09
WO2002022309A1 (en) 2002-03-21
CN1474735A (en) 2004-02-11
TW550165B (en) 2003-09-01
EP1318891B1 (en) 2005-04-20

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