AU2001289214A1 - Improved structure identification using scattering signatures - Google Patents

Improved structure identification using scattering signatures

Info

Publication number
AU2001289214A1
AU2001289214A1 AU2001289214A AU8921401A AU2001289214A1 AU 2001289214 A1 AU2001289214 A1 AU 2001289214A1 AU 2001289214 A AU2001289214 A AU 2001289214A AU 8921401 A AU8921401 A AU 8921401A AU 2001289214 A1 AU2001289214 A1 AU 2001289214A1
Authority
AU
Australia
Prior art keywords
improved structure
structure identification
scattering signatures
signatures
scattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001289214A
Other languages
English (en)
Inventor
Steve W. Farrer
Richard H. Krukar
Christopher J. Raymond
Scott R. Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanometrics Inc
Original Assignee
Accent Optical Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Accent Optical Technologies Inc filed Critical Accent Optical Technologies Inc
Publication of AU2001289214A1 publication Critical patent/AU2001289214A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/129—Using chemometrical methods
    • G01N2201/1293—Using chemometrical methods resolving multicomponent spectra

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Immunology (AREA)
  • Data Mining & Analysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computational Mathematics (AREA)
  • Algebra (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Complex Calculations (AREA)
  • Image Analysis (AREA)
  • Information Retrieval, Db Structures And Fs Structures Therefor (AREA)
AU2001289214A 2000-09-13 2001-09-13 Improved structure identification using scattering signatures Abandoned AU2001289214A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23257800P 2000-09-13 2000-09-13
US60232578 2000-09-13
US09/952,546 US6728663B2 (en) 2000-09-13 2001-09-12 Structure identification using scattering signatures
US09952546 2001-09-12
PCT/US2001/042123 WO2002023382A1 (en) 2000-09-13 2001-09-13 Improved structure identification using scattering signatures

Publications (1)

Publication Number Publication Date
AU2001289214A1 true AU2001289214A1 (en) 2002-03-26

Family

ID=26926141

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001289214A Abandoned AU2001289214A1 (en) 2000-09-13 2001-09-13 Improved structure identification using scattering signatures

Country Status (8)

Country Link
US (1) US6728663B2 (ko)
EP (1) EP1323063A4 (ko)
JP (1) JP2004509412A (ko)
KR (2) KR100851417B1 (ko)
CN (1) CN1215423C (ko)
AU (1) AU2001289214A1 (ko)
IL (2) IL154843A0 (ko)
WO (1) WO2002023382A1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6483580B1 (en) 1998-03-06 2002-11-19 Kla-Tencor Technologies Corporation Spectroscopic scatterometer system
US7099005B1 (en) * 2000-09-27 2006-08-29 Kla-Tencor Technologies Corporation System for scatterometric measurements and applications
US6900892B2 (en) * 2000-12-19 2005-05-31 Kla-Tencor Technologies Corporation Parametric profiling using optical spectroscopic systems
US7515279B2 (en) 2001-03-02 2009-04-07 Nanometrics Incorporated Line profile asymmetry measurement
JP4938219B2 (ja) * 2001-12-19 2012-05-23 ケーエルエー−テンカー コーポレイション 光学分光システムを使用するパラメトリック・プロフィーリング
US7119893B2 (en) * 2003-04-10 2006-10-10 Accent Optical Technologies, Inc. Determination of center of focus by parameter variability analysis
US20070091325A1 (en) * 2005-01-07 2007-04-26 Mehrdad Nikoonahad Multi-channel optical metrology
US7467064B2 (en) * 2006-02-07 2008-12-16 Timbre Technologies, Inc. Transforming metrology data from a semiconductor treatment system using multivariate analysis
US7698098B2 (en) * 2008-02-18 2010-04-13 Thermo Electron Scientific Instruments Llc Efficient spectral matching, particularly for multicomponent spectra
WO2013005377A1 (ja) * 2011-07-01 2013-01-10 パナソニック株式会社 受信装置、送信装置、設定方法、及び特定方法
CN102798342B (zh) * 2012-08-02 2014-11-12 华中科技大学 一种用于光学散射测量的基于拟合误差插值的库匹配方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274714A (en) * 1990-06-04 1993-12-28 Neuristics, Inc. Method and apparatus for determining and organizing feature vectors for neural network recognition
US5241369A (en) 1990-10-01 1993-08-31 Mcneil John R Two-dimensional optical scatterometer apparatus and process
US5114233A (en) 1990-10-09 1992-05-19 At&T Bell Laboratories Method for inspecting etched workpieces
EP0587093B1 (en) 1992-09-08 1999-11-24 Hitachi, Ltd. Information processing apparatus using inference and adaptive learning
US6122403A (en) * 1995-07-27 2000-09-19 Digimarc Corporation Computer system linked by using information in data objects
US5748763A (en) * 1993-11-18 1998-05-05 Digimarc Corporation Image steganography system featuring perceptually adaptive and globally scalable signal embedding
US5703692A (en) 1995-08-03 1997-12-30 Bio-Rad Laboratories, Inc. Lens scatterometer system employing source light beam scanning means
US5739909A (en) 1995-10-10 1998-04-14 Lucent Technologies Inc. Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry
US5867276A (en) 1997-03-07 1999-02-02 Bio-Rad Laboratories, Inc. Method for broad wavelength scatterometry
US6075594A (en) 1997-07-16 2000-06-13 Ncr Corporation System and method for spectroscopic product recognition and identification
US6480299B1 (en) * 1997-11-25 2002-11-12 University Technology Corporation Color printer characterization using optimization theory and neural networks
US20010051856A1 (en) 2000-01-26 2001-12-13 Xinhui Niu Caching of intra-layer calculations for rapid rigorous coupled-wave analyses
AU2001279247A1 (en) 2000-08-10 2002-02-25 Sensys Instruments Corporation Database interpolation method for optical measurement of diffractive microstructures

Also Published As

Publication number Publication date
CN1215423C (zh) 2005-08-17
JP2004509412A (ja) 2004-03-25
IL154843A0 (en) 2003-10-31
US6728663B2 (en) 2004-04-27
KR20080021800A (ko) 2008-03-07
EP1323063A4 (en) 2006-10-04
KR100851417B1 (ko) 2008-08-08
WO2002023382A1 (en) 2002-03-21
IL154843A (en) 2008-11-03
EP1323063A1 (en) 2003-07-02
US20020046008A1 (en) 2002-04-18
CN1455900A (zh) 2003-11-12
KR20030045068A (ko) 2003-06-09

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