AU2001287190A1 - Small-spot spectrometry instrument with reduced polarization - Google Patents

Small-spot spectrometry instrument with reduced polarization

Info

Publication number
AU2001287190A1
AU2001287190A1 AU2001287190A AU8719001A AU2001287190A1 AU 2001287190 A1 AU2001287190 A1 AU 2001287190A1 AU 2001287190 A AU2001287190 A AU 2001287190A AU 8719001 A AU8719001 A AU 8719001A AU 2001287190 A1 AU2001287190 A1 AU 2001287190A1
Authority
AU
Australia
Prior art keywords
small
spectrometry instrument
reduced polarization
spot
spot spectrometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001287190A
Inventor
Kenneth C. Johnson
Adam E. Norton
Fred E. Stanke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensys Instruments Corp
Original Assignee
Sensys Instruments Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensys Instruments Corp filed Critical Sensys Instruments Corp
Publication of AU2001287190A1 publication Critical patent/AU2001287190A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
AU2001287190A 2000-08-18 2001-08-17 Small-spot spectrometry instrument with reduced polarization Abandoned AU2001287190A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22639600P 2000-08-18 2000-08-18
US60/226,396 2000-08-18
PCT/US2001/041770 WO2002016893A2 (en) 2000-08-18 2001-08-17 Small-spot spectrometry instrument with reduced polarization

Publications (1)

Publication Number Publication Date
AU2001287190A1 true AU2001287190A1 (en) 2002-03-04

Family

ID=22848745

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001287190A Abandoned AU2001287190A1 (en) 2000-08-18 2001-08-17 Small-spot spectrometry instrument with reduced polarization

Country Status (6)

Country Link
US (1) US6667805B2 (en)
EP (1) EP1311893B8 (en)
JP (1) JP4774186B2 (en)
AU (1) AU2001287190A1 (en)
DE (1) DE60115463T2 (en)
WO (1) WO2002016893A2 (en)

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DE10120424B4 (en) * 2001-04-26 2004-08-05 Leica Microsystems Heidelberg Gmbh Scanning microscope and decoupling element
US6738136B2 (en) * 2001-11-09 2004-05-18 Therma-Wave, Inc. Accurate small-spot spectrometry instrument
US7095496B2 (en) * 2001-12-12 2006-08-22 Tokyo Electron Limited Method and apparatus for position-dependent optical metrology calibration
US7064828B1 (en) 2001-12-19 2006-06-20 Nanometrics Incorporated Pulsed spectroscopy with spatially variable polarization modulation element
JP4238633B2 (en) * 2003-05-19 2009-03-18 コニカミノルタオプト株式会社 Depolarizing element, spectroscope and optical fiber amplifier using the element
US7230704B2 (en) * 2003-06-06 2007-06-12 Tokyo Electron Limited Diffracting, aperiodic targets for overlay metrology and method to detect gross overlay
US7230703B2 (en) * 2003-07-17 2007-06-12 Tokyo Electron Limited Apparatus and method for measuring overlay by diffraction gratings
US7061613B1 (en) 2004-01-13 2006-06-13 Nanometrics Incorporated Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation
US7268881B2 (en) 2004-02-17 2007-09-11 The Curators Of The University Of Missouri Light scattering detector
US20050201419A1 (en) * 2004-03-10 2005-09-15 Nokia Corporation System and associated terminal, method and computer program product for synchronizing distributively presented multimedia objects
DE102004023178B4 (en) * 2004-05-07 2006-06-29 Hellma Gmbh & Co. Kg Apparatus for analysis or absorption measurement on a small amount of liquid medium by means of light
US7262844B2 (en) * 2005-01-13 2007-08-28 The Curators Of The University Of Missouri Ultrasensitive spectrophotometer
US7903252B2 (en) * 2005-01-13 2011-03-08 The Curators Of The University Of Missouri Noise cancellation in fourier transform spectrophotometry
JP2006300886A (en) * 2005-04-25 2006-11-02 Shin Etsu Handotai Co Ltd Microscopic optical analysis system
EP1892544A1 (en) * 2006-08-25 2008-02-27 JDS Uniphase Corporation Passive depolariser
WO2009152321A1 (en) * 2008-06-11 2009-12-17 The Curators Of The University Of Missouri Liquid chromatography detector and flow controller therefor
JP5482195B2 (en) * 2009-12-25 2014-04-23 横河電機株式会社 Retardation measuring device
KR101294220B1 (en) * 2011-11-21 2013-08-07 동우 화인켐 주식회사 Apparatus for acquiring image of patterned retarder
GB201713740D0 (en) * 2017-08-25 2017-10-11 Nkt Photonics As Depolarizing homogenizer
KR20220074626A (en) * 2020-11-27 2022-06-03 삼성전자주식회사 HSI apparatus and inspection apparatus including the same
CN112859359B (en) * 2021-02-05 2022-02-08 中国工程物理研究院激光聚变研究中心 Focal spot control method

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Publication number Priority date Publication date Assignee Title
JPS59155806A (en) 1983-02-24 1984-09-05 Kokusai Denshin Denwa Co Ltd <Kdd> Non-polarization element
EP0176826A3 (en) * 1984-09-24 1987-09-02 Kollmorgen Technologies Corporation Method and apparatus for dual-beam spectral transmission measurements
US4818169A (en) * 1985-05-17 1989-04-04 Schram Richard R Automated wafer inspection system
US4712912A (en) 1986-03-10 1987-12-15 Spectra-Tech, Inc. Spectrophotometric image scrambler for full aperture microspectroscopy
JPH0827212B2 (en) 1987-11-09 1996-03-21 大塚電子株式会社 Spectroscope
JP2572627B2 (en) 1988-05-13 1997-01-16 ティーディーケイ株式会社 Optical isolator and optical circulator
US5037200A (en) * 1989-07-11 1991-08-06 Tosoh Corporation Laser-operated detector
JPH04358115A (en) 1991-06-04 1992-12-11 Fujitsu Ltd Polarization depencence eliminating filter assembly
US5218652A (en) 1991-08-29 1993-06-08 Minnesota Mining And Manufacturing Company Depolarizer for electromagnetic radiation
JP3289941B2 (en) * 1992-03-13 2002-06-10 オリンパス光学工業株式会社 System microscope
EP0570151B1 (en) 1992-05-08 1997-10-29 Kokusai Denshin Denwa Co., Ltd Optical transmitter with the signal light of reduced degree of polarization and optical depolarizing circuit
US5243465A (en) * 1992-05-12 1993-09-07 Tencor Instruments Area-division beamsplitter with broad spectral bandwidth
JP3647892B2 (en) 1994-01-28 2005-05-18 並木精密宝石株式会社 Optical isolator
US5578832A (en) * 1994-09-02 1996-11-26 Affymetrix, Inc. Method and apparatus for imaging a sample on a device
JP3177104B2 (en) 1994-09-16 2001-06-18 日本アイ・ビー・エム株式会社 Flare prevention optical system, flare prevention method, flying height measurement device
JPH08122706A (en) 1994-10-19 1996-05-17 Advantest Corp Polarization eliminator and spectroscopic device
JP3563800B2 (en) * 1995-01-09 2004-09-08 オリンパス株式会社 Observation optical device
US6040906A (en) 1996-07-11 2000-03-21 Harhay; Gregory P. Resonance raman spectroscopy for identifying and quantitating biomatter, organic, and inorganic analytes
US5877859A (en) * 1996-07-24 1999-03-02 Therma-Wave, Inc. Broadband spectroscopic rotating compensator ellipsometer
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JPH11231222A (en) * 1998-01-27 1999-08-27 Carl Zeiss Jena Gmbh Microscope with scanning unit, and arrangement therefor and operation method therefor

Also Published As

Publication number Publication date
WO2002016893B1 (en) 2003-01-09
EP1311893B8 (en) 2006-02-01
WO2002016893A3 (en) 2002-08-29
US6667805B2 (en) 2003-12-23
JP4774186B2 (en) 2011-09-14
WO2002016893A2 (en) 2002-02-28
EP1311893A2 (en) 2003-05-21
DE60115463D1 (en) 2006-01-05
EP1311893B1 (en) 2005-11-30
JP2004507727A (en) 2004-03-11
DE60115463T2 (en) 2006-07-27
US20020021441A1 (en) 2002-02-21

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