AU2001284408A1 - Monolithic printhead with self-aligned groove and relative manufacturing process - Google Patents

Monolithic printhead with self-aligned groove and relative manufacturing process

Info

Publication number
AU2001284408A1
AU2001284408A1 AU2001284408A AU8440801A AU2001284408A1 AU 2001284408 A1 AU2001284408 A1 AU 2001284408A1 AU 2001284408 A AU2001284408 A AU 2001284408A AU 8440801 A AU8440801 A AU 8440801A AU 2001284408 A1 AU2001284408 A1 AU 2001284408A1
Authority
AU
Australia
Prior art keywords
self
manufacturing process
groove
aligned groove
relative manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001284408A
Inventor
Renato Conta
Anna Merialdo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olivetti Tecnost SpA
Original Assignee
Olivetti Tecnost SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olivetti Tecnost SpA filed Critical Olivetti Tecnost SpA
Publication of AU2001284408A1 publication Critical patent/AU2001284408A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Abstract

A monolithic thermal ink jet printhead ( 40 ) comprising a groove ( 45 ), a plurality of chambers ( 74 ) and nozzles ( 56 ) is manufactured by means of steps of: ( 203, 205 ) partially etching the groove ( 45 ) by means of a "dry" process and a "wet" process; ( 210 ) depositing a plurality of sacrificial layers ( 54 ); ( 212 ) obtaining a plurality of casts ( 156 ); ( 216 ) completing the etching of the groove ( 45 ) by means of an electrochemical process; and ( 220 ) removing the casts ( 156 ) and the sacrificial layers ( 54 ) in such a way as to obtain a plurality of nozzles ( 56 ) and chambers ( 74 ).
AU2001284408A 2000-08-23 2001-08-22 Monolithic printhead with self-aligned groove and relative manufacturing process Abandoned AU2001284408A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITTO200A000813 2000-08-23
IT2000TO000813A IT1320599B1 (en) 2000-08-23 2000-08-23 MONOLITHIC PRINT HEAD WITH SELF-ALIGNED GROOVING AND RELATIVE MANUFACTURING PROCESS.
PCT/IT2001/000448 WO2002016140A1 (en) 2000-08-23 2001-08-22 Monolithic printhead with self-aligned groove and relative manufacturing process

Publications (1)

Publication Number Publication Date
AU2001284408A1 true AU2001284408A1 (en) 2002-03-04

Family

ID=11458007

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001284408A Abandoned AU2001284408A1 (en) 2000-08-23 2001-08-22 Monolithic printhead with self-aligned groove and relative manufacturing process

Country Status (7)

Country Link
US (2) US6887393B2 (en)
EP (1) EP1311395B1 (en)
AT (1) ATE353763T1 (en)
AU (1) AU2001284408A1 (en)
DE (1) DE60126621T2 (en)
IT (1) IT1320599B1 (en)
WO (1) WO2002016140A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7419250B2 (en) * 1999-10-15 2008-09-02 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
AU1139100A (en) 1998-10-16 2000-05-08 Silverbrook Research Pty Limited Improvements relating to inkjet printers
US7144100B2 (en) * 2004-01-07 2006-12-05 Xerox Corporation Purgeable print head reservoir
US7214324B2 (en) * 2005-04-15 2007-05-08 Delphi Technologies, Inc. Technique for manufacturing micro-electro mechanical structures
JP5171002B2 (en) * 2006-09-25 2013-03-27 キヤノン株式会社 Method for manufacturing ink jet recording head
US7855151B2 (en) * 2007-08-21 2010-12-21 Hewlett-Packard Development Company, L.P. Formation of a slot in a silicon substrate
JP5031492B2 (en) * 2007-09-06 2012-09-19 キヤノン株式会社 Inkjet head substrate manufacturing method
JP2009137173A (en) * 2007-12-06 2009-06-25 Canon Inc Liquid discharge head and recording device
US20110181664A1 (en) * 2010-01-27 2011-07-28 Fujifilm Corporation Forming Self-Aligned Nozzles
CN104080611B (en) * 2012-03-16 2016-02-03 惠普发展公司，有限责任合伙企业 There is the printhead of depression slit end
KR101968636B1 (en) 2012-12-06 2019-04-12 삼성전자주식회사 Inkjet printing device and nozzle forming method
KR20150112029A (en) 2013-02-28 2015-10-06 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Molded print bar
US10821729B2 (en) 2013-02-28 2020-11-03 Hewlett-Packard Development Company, L.P. Transfer molded fluid flow structure
KR101827070B1 (en) 2013-02-28 2018-02-07 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. Molding a fluid flow structure
US9724920B2 (en) 2013-03-20 2017-08-08 Hewlett-Packard Development Company, L.P. Molded die slivers with exposed front and back surfaces
WO2019202723A1 (en) * 2018-04-20 2019-10-24 コニカミノルタ株式会社 Method for manufacturing nozzle plate, and ink jet head

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317346A (en) * 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
US5278584A (en) 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
JP2960608B2 (en) 1992-06-04 1999-10-12 キヤノン株式会社 Method for manufacturing liquid jet recording head
JP3222593B2 (en) * 1992-12-28 2001-10-29 キヤノン株式会社 Inkjet recording head and monolithic integrated circuit for inkjet recording head
US5308442A (en) 1993-01-25 1994-05-03 Hewlett-Packard Company Anisotropically etched ink fill slots in silicon
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5635966A (en) 1994-01-11 1997-06-03 Hewlett-Packard Company Edge feed ink delivery thermal inkjet printhead structure and method of fabrication
US5635968A (en) * 1994-04-29 1997-06-03 Hewlett-Packard Company Thermal inkjet printer printhead with offset heater resistors
JPH08142323A (en) 1994-11-24 1996-06-04 Sharp Corp Ink jet head and manufacture thereof
JP3343875B2 (en) 1995-06-30 2002-11-11 キヤノン株式会社 Method of manufacturing inkjet head
US5658471A (en) 1995-09-22 1997-08-19 Lexmark International, Inc. Fabrication of thermal ink-jet feed slots in a silicon substrate
US6113221A (en) 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
KR100311880B1 (en) * 1996-11-11 2001-12-20 미다라이 후지오 Method of producing a through-hole, silicon substrate having a through-hole, device using such a substrate, method of producing an ink-jet print head, and ink-jet print head
DE69730667T2 (en) * 1996-11-11 2005-09-22 Canon K.K. A method of making a via, use of this method of making a silicon substrate having such a via, or apparatus with that substrate, methods of making an inkjet printhead, and use of this method of making an inkjet printhead
US6019907A (en) 1997-08-08 2000-02-01 Hewlett-Packard Company Forming refill for monolithic inkjet printhead
US6391527B2 (en) 1998-04-16 2002-05-21 Canon Kabushiki Kaisha Method of producing micro structure, method of production liquid discharge head
IT1310099B1 (en) 1999-07-12 2002-02-11 Olivetti Lexikon Spa MONOLITHIC PRINT HEAD AND RELATED MANUFACTURING PROCESS.
IT1311361B1 (en) 1999-11-15 2002-03-12 Olivetti Lexikon Spa MONILITHIC PRINT HEAD WITH INTEGRATED EQUIPOTENTIAL NETWORK ERELATIVE MANUFACTURING METHOD.
US6805432B1 (en) * 2001-07-31 2004-10-19 Hewlett-Packard Development Company, L.P. Fluid ejecting device with fluid feed slot
DE102004007143B4 (en) 2004-02-12 2012-04-05 Rieter Ingolstadt Gmbh Method and device for drawing at least one sliver

Also Published As

Publication number Publication date
US6887393B2 (en) 2005-05-03
US20040119774A1 (en) 2004-06-24
IT1320599B1 (en) 2003-12-10
ITTO20000813A1 (en) 2002-02-23
ITTO20000813A0 (en) 2000-08-23
DE60126621D1 (en) 2007-03-29
WO2002016140A1 (en) 2002-02-28
ATE353763T1 (en) 2007-03-15
EP1311395A1 (en) 2003-05-21
US7066581B2 (en) 2006-06-27
DE60126621T2 (en) 2007-12-06
EP1311395B1 (en) 2007-02-14
US20030156161A1 (en) 2003-08-21

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