EP1083048A4 - Ink jet recording head and manufacturing method thereof - Google Patents

Ink jet recording head and manufacturing method thereof

Info

Publication number
EP1083048A4
EP1083048A4 EP99923867A EP99923867A EP1083048A4 EP 1083048 A4 EP1083048 A4 EP 1083048A4 EP 99923867 A EP99923867 A EP 99923867A EP 99923867 A EP99923867 A EP 99923867A EP 1083048 A4 EP1083048 A4 EP 1083048A4
Authority
EP
European Patent Office
Prior art keywords
recording head
manufacturing
ink jet
jet recording
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99923867A
Other languages
German (de)
French (fr)
Other versions
EP1083048A1 (en
Inventor
Takashi Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of EP1083048A1 publication Critical patent/EP1083048A1/en
Publication of EP1083048A4 publication Critical patent/EP1083048A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

A recording head comprising a plurality of pressure chambers (2a, 2b, 2c) communicating with a nozzle and an ink supply port and having vibrating walls (3a, 3b, 3c) and a plurality of piezoelectric elements (7a, 7b, 7c) having external electrodes (8a, 9a) and connected to relative vibrating walls, wherein each piezoelectric element has an active region (12a) where an internal distortion is generated by a voltage application between the external electrodes and inactive regions (10a, 11a) where no internal distortion is generated on application of a voltage and is joined to a pressure chamber via the active region and a vibrating wall and to the pressure chamber via the inactive regions.
EP99923867A 1998-06-02 1999-06-02 Ink jet recording head and manufacturing method thereof Withdrawn EP1083048A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15338098A JP3248486B2 (en) 1998-06-02 1998-06-02 Ink jet recording head and method of manufacturing the same
JP15338098 1998-06-02
PCT/JP1999/002945 WO1999062712A1 (en) 1998-06-02 1999-06-02 Ink jet recording head and manufacturing method thereof

Publications (2)

Publication Number Publication Date
EP1083048A1 EP1083048A1 (en) 2001-03-14
EP1083048A4 true EP1083048A4 (en) 2001-09-19

Family

ID=15561211

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99923867A Withdrawn EP1083048A4 (en) 1998-06-02 1999-06-02 Ink jet recording head and manufacturing method thereof

Country Status (4)

Country Link
EP (1) EP1083048A4 (en)
JP (1) JP3248486B2 (en)
AU (1) AU4058699A (en)
WO (1) WO1999062712A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002248765A (en) 2000-12-19 2002-09-03 Fuji Xerox Co Ltd Ink-jet recording head and ink-jet recording apparatus
US20020196314A1 (en) * 2001-06-25 2002-12-26 Xerox Corporation Piezoelectric transducer
CN1189325C (en) * 2001-07-09 2005-02-16 株式会社理光 Liquid drop spray head and ink-jet recording apparatus
JP4622362B2 (en) * 2004-07-26 2011-02-02 ブラザー工業株式会社 Inkjet head
JP2006096034A (en) * 2004-08-31 2006-04-13 Brother Ind Ltd Piezoelectric actuator with grooved diaphragm and piezoelectric layer, liquid transporting apparatus, and its manufacturing method
US7731340B2 (en) 2005-08-31 2010-06-08 Brother Kogyo Kabushiki Kaisha Liquid jetting head and method for producing the same
KR100738102B1 (en) 2006-02-01 2007-07-12 삼성전자주식회사 Piezoelectric inkjet printhead
JP5151844B2 (en) 2008-09-16 2013-02-27 株式会社リコー Droplet ejection head, droplet discharge device, and image forming apparatus
KR101063450B1 (en) * 2009-01-21 2011-09-08 삼성전기주식회사 Inkjet Head Manufacturing Method
KR20100104730A (en) * 2009-03-19 2010-09-29 삼성전기주식회사 Method for manufacturing ink-jet head
KR102498977B1 (en) 2020-12-01 2023-02-15 주식회사 이엠텍 Heater for microparticle generator and installation structure of the same
KR20220137308A (en) 2021-04-02 2022-10-12 주식회사 이엠텍 Heater for microparticle generator and installation structure of the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0723866A1 (en) * 1993-10-14 1996-07-31 Citizen Watch Co. Ltd. Ink jet head, method for producing the same and method for driving the same
JPH09174836A (en) * 1995-12-22 1997-07-08 Nec Corp Ink jet recording head and manufacture thereof
EP0783965A2 (en) * 1995-08-22 1997-07-16 Nec Corporation Fluid drop projecting apparatus and fluid drop projecting method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3264945B2 (en) * 1991-07-22 2002-03-11 セイコーエプソン株式会社 Inkjet head
JPH07314672A (en) * 1994-05-25 1995-12-05 Seiko Epson Corp Ink jet recording head
JPH08127124A (en) * 1994-11-02 1996-05-21 Mita Ind Co Ltd Ink jet recording head

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0723866A1 (en) * 1993-10-14 1996-07-31 Citizen Watch Co. Ltd. Ink jet head, method for producing the same and method for driving the same
EP0783965A2 (en) * 1995-08-22 1997-07-16 Nec Corporation Fluid drop projecting apparatus and fluid drop projecting method
JPH09174836A (en) * 1995-12-22 1997-07-08 Nec Corp Ink jet recording head and manufacture thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 11 28 November 1997 (1997-11-28) *
See also references of WO9962712A1 *

Also Published As

Publication number Publication date
JP3248486B2 (en) 2002-01-21
WO1999062712A1 (en) 1999-12-09
AU4058699A (en) 1999-12-20
EP1083048A1 (en) 2001-03-14
JPH11348276A (en) 1999-12-21

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