AU2001277743A1 - Method and device for producing organic el elements - Google Patents

Method and device for producing organic el elements

Info

Publication number
AU2001277743A1
AU2001277743A1 AU2001277743A AU7774301A AU2001277743A1 AU 2001277743 A1 AU2001277743 A1 AU 2001277743A1 AU 2001277743 A AU2001277743 A AU 2001277743A AU 7774301 A AU7774301 A AU 7774301A AU 2001277743 A1 AU2001277743 A1 AU 2001277743A1
Authority
AU
Australia
Prior art keywords
elements
producing organic
organic
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001277743A
Inventor
Shuhei Hotta
Kazuo Ishii
Hiroshi Miyazaki
Yoshitaka Uchihori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OSAKA YUKA INDUSTRIES Co Ltd
Nippon Steel Chemical and Materials Co Ltd
Seta Giken KK
Original Assignee
OSAKA YUKA INDUSTRIES Co Ltd
Osaka Yuki Kagaku Kogyo KK
Nippon Steel Chemical Co Ltd
Seta Giken KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OSAKA YUKA INDUSTRIES Co Ltd, Osaka Yuki Kagaku Kogyo KK, Nippon Steel Chemical Co Ltd, Seta Giken KK filed Critical OSAKA YUKA INDUSTRIES Co Ltd
Publication of AU2001277743A1 publication Critical patent/AU2001277743A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
AU2001277743A 2000-08-10 2001-08-09 Method and device for producing organic el elements Abandoned AU2001277743A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000-242164 2000-08-10
JP2000242164 2000-08-10
JP2001196679 2001-06-28
JP2001-196679 2001-06-28
PCT/JP2001/006874 WO2002014575A1 (en) 2000-08-10 2001-08-09 Method and device for producing organic el elements

Publications (1)

Publication Number Publication Date
AU2001277743A1 true AU2001277743A1 (en) 2002-02-25

Family

ID=26597698

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001277743A Abandoned AU2001277743A1 (en) 2000-08-10 2001-08-09 Method and device for producing organic el elements

Country Status (7)

Country Link
EP (1) EP1354979A4 (en)
JP (1) JP3929397B2 (en)
KR (1) KR20030038689A (en)
CN (1) CN1252312C (en)
AU (1) AU2001277743A1 (en)
TW (1) TWI254599B (en)
WO (1) WO2002014575A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003253434A (en) * 2002-03-01 2003-09-10 Sanyo Electric Co Ltd Vapor deposition method, and method for manufacturing display device
JP3837344B2 (en) * 2002-03-11 2006-10-25 三洋電機株式会社 Optical element and manufacturing method thereof
JP4139186B2 (en) * 2002-10-21 2008-08-27 東北パイオニア株式会社 Vacuum deposition equipment
JP4366226B2 (en) * 2004-03-30 2009-11-18 東北パイオニア株式会社 Organic EL panel manufacturing method, organic EL panel film forming apparatus
KR100761079B1 (en) * 2005-01-31 2007-09-21 삼성에스디아이 주식회사 Deposition source having a cooling means and deposition apparatus using the same
JP4001296B2 (en) 2005-08-25 2007-10-31 トッキ株式会社 Method and apparatus for vacuum deposition of organic materials
US20080166472A1 (en) * 2006-12-13 2008-07-10 Universal Display Corporation Evaporation process for solid phase materials
DE112008000669T5 (en) * 2007-03-26 2010-03-25 ULVAC, Inc., Chigasaki-shi Vapor deposition source, vapor deposition apparatus, film forming process
CN101988185A (en) * 2010-12-14 2011-03-23 无锡虹彩科技发展有限公司 Film coating source, vacuum film coating device and film coating process thereof
TWI541612B (en) * 2014-12-30 2016-07-11 Organic vacuum coating system and film forming method
CN106973448A (en) * 2016-01-13 2017-07-21 张家港康得新光电材料有限公司 Heater
KR20180002505A (en) * 2016-06-29 2018-01-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Manufacturing method of light-emitting element
WO2019187902A1 (en) 2018-03-28 2019-10-03 公益財団法人福岡県産業・科学技術振興財団 Vapor deposition apparatus and method for producing organic electronic device
JP6709272B2 (en) * 2018-03-28 2020-06-10 公益財団法人福岡県産業・科学技術振興財団 Vapor deposition apparatus and organic electronic device production method
KR20200076389A (en) * 2018-12-19 2020-06-29 주식회사 포스코 Apparatus and method for controlling coating layer in pvd plating processs
CN114667366A (en) * 2020-01-07 2022-06-24 应用材料公司 Assembly for material evaporation, vacuum deposition apparatus and method for material evaporation
JP7350045B2 (en) * 2021-12-07 2023-09-25 長州産業株式会社 Deposition crucible, deposition source and deposition equipment

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106759U (en) * 1980-12-18 1982-07-01
JPS5835927A (en) * 1981-08-28 1983-03-02 Fujitsu Ltd Manufacture of semiconductor device
US4539507A (en) * 1983-03-25 1985-09-03 Eastman Kodak Company Organic electroluminescent devices having improved power conversion efficiencies
JP2889607B2 (en) * 1989-09-09 1999-05-10 株式会社瀬田技研 Electromagnetic induction heating device and electromagnetic induction heating method
JPH04308076A (en) * 1991-04-03 1992-10-30 Mitsubishi Heavy Ind Ltd Vacuum deposition device for sublimable substance
JPH08264272A (en) * 1995-03-27 1996-10-11 Seta Giken:Kk Electromagnetic induction heater
JPH09329589A (en) * 1996-06-11 1997-12-22 Dainippon Ink & Chem Inc Method for extraction and analysis of organic low-molecular weight compound
JP3691615B2 (en) * 1996-12-06 2005-09-07 株式会社アルバック Evaporation source for organic materials
JP3453290B2 (en) * 1997-12-26 2003-10-06 松下電器産業株式会社 Electrode structure for vapor deposition, vapor deposition apparatus, vapor deposition method, and method for manufacturing organic light emitting device
JP3175733B2 (en) * 1998-06-17 2001-06-11 日本電気株式会社 Manufacturing method of organic EL device

Also Published As

Publication number Publication date
CN1252312C (en) 2006-04-19
WO2002014575A1 (en) 2002-02-21
EP1354979A1 (en) 2003-10-22
JP3929397B2 (en) 2007-06-13
TWI254599B (en) 2006-05-01
EP1354979A4 (en) 2008-03-26
KR20030038689A (en) 2003-05-16
CN1446268A (en) 2003-10-01

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