AU2001276621A1 - Electro-optical mask controllable pattern - Google Patents

Electro-optical mask controllable pattern

Info

Publication number
AU2001276621A1
AU2001276621A1 AU2001276621A AU7662101A AU2001276621A1 AU 2001276621 A1 AU2001276621 A1 AU 2001276621A1 AU 2001276621 A AU2001276621 A AU 2001276621A AU 7662101 A AU7662101 A AU 7662101A AU 2001276621 A1 AU2001276621 A1 AU 2001276621A1
Authority
AU
Australia
Prior art keywords
electro
optical mask
controllable pattern
controllable
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001276621A
Inventor
Eduardo Matallana
Luis A. Ruiz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2001276621A1 publication Critical patent/AU2001276621A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery

Landscapes

  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • General Physics & Mathematics (AREA)
  • Surgery (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Liquid Crystal (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
AU2001276621A 2000-06-21 2001-06-20 Electro-optical mask controllable pattern Abandoned AU2001276621A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/598,227 US6464692B1 (en) 2000-06-21 2000-06-21 Controllable electro-optical patternable mask, system with said mask and method of using the same
US09/598,227 2000-06-21
PCT/IB2001/001448 WO2001097725A2 (en) 2000-06-21 2001-06-20 Electro-optical mask controllable pattern

Publications (1)

Publication Number Publication Date
AU2001276621A1 true AU2001276621A1 (en) 2002-01-02

Family

ID=24394729

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001276621A Abandoned AU2001276621A1 (en) 2000-06-21 2001-06-20 Electro-optical mask controllable pattern

Country Status (3)

Country Link
US (2) US6464692B1 (en)
AU (1) AU2001276621A1 (en)
WO (1) WO2001097725A2 (en)

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Also Published As

Publication number Publication date
US6464692B1 (en) 2002-10-15
US6770068B2 (en) 2004-08-03
US20030036750A1 (en) 2003-02-20
WO2001097725A3 (en) 2003-03-13
WO2001097725A2 (en) 2001-12-27

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