AU2001276456A1 - Compact spectroscopic ellipsometer - Google Patents

Compact spectroscopic ellipsometer

Info

Publication number
AU2001276456A1
AU2001276456A1 AU2001276456A AU7645601A AU2001276456A1 AU 2001276456 A1 AU2001276456 A1 AU 2001276456A1 AU 2001276456 A AU2001276456 A AU 2001276456A AU 7645601 A AU7645601 A AU 7645601A AU 2001276456 A1 AU2001276456 A1 AU 2001276456A1
Authority
AU
Australia
Prior art keywords
spectroscopic ellipsometer
compact spectroscopic
compact
ellipsometer
spectroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001276456A
Inventor
Pierre Boher
Jean-Philippe Piel
Jean-Pierre Rey
Jean-Louis Stehle
Luc Tantart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA
Original Assignee
PRODUCTION ET DE RECH S APPLIQ
Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRODUCTION ET DE RECH S APPLIQ, Societe de Commercialisation des Produits de la Recherche Appliquee SOCPRA filed Critical PRODUCTION ET DE RECH S APPLIQ
Publication of AU2001276456A1 publication Critical patent/AU2001276456A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
AU2001276456A 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer Abandoned AU2001276456A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0009318A FR2811761B1 (en) 2000-07-17 2000-07-17 HIGH SPACE RESOLUTION ELLIPSOMETER OPERATING IN THE INFRARED
FR0009318 2000-07-17
PCT/FR2001/002305 WO2002006779A2 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer

Publications (1)

Publication Number Publication Date
AU2001276456A1 true AU2001276456A1 (en) 2002-01-30

Family

ID=8852567

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2001270701A Abandoned AU2001270701A1 (en) 2000-07-17 2001-06-28 High spatial resolution infrared ellipsometer
AU2001276456A Abandoned AU2001276456A1 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU2001270701A Abandoned AU2001270701A1 (en) 2000-07-17 2001-06-28 High spatial resolution infrared ellipsometer

Country Status (7)

Country Link
US (2) US6819423B2 (en)
EP (2) EP1301764A1 (en)
JP (2) JP2004504591A (en)
KR (2) KR100846474B1 (en)
AU (2) AU2001270701A1 (en)
FR (1) FR2811761B1 (en)
WO (2) WO2002006780A1 (en)

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US9377394B2 (en) 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) * 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
US10338362B1 (en) 2014-06-06 2019-07-02 J.A. Woollam Co., Inc. Beam focusing and reflecting optics with enhanced detector system
US9442016B2 (en) 2014-06-06 2016-09-13 J.A. Woollam Co., Inc Reflective focusing optics
US9921395B1 (en) 2015-06-09 2018-03-20 J.A. Woollam Co., Inc. Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area
US10018815B1 (en) 2014-06-06 2018-07-10 J.A. Woolam Co., Inc. Beam focusing and reflective optics
KR102313345B1 (en) 2014-10-02 2021-10-15 삼성전자주식회사 Broadband light source and optical inspector having the same
KR102016452B1 (en) * 2017-12-27 2019-08-30 한양대학교 에리카산학협력단 Ellipsometer
KR102029824B1 (en) * 2018-04-11 2019-10-08 조선대학교산학협력단 Multi channel optical profiler based on ellipsometry
RU2688961C1 (en) * 2018-07-06 2019-05-23 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Device for measuring bidirectional infrared radiation brightness coefficient of materials
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Also Published As

Publication number Publication date
US6819423B2 (en) 2004-11-16
AU2001270701A1 (en) 2002-01-30
KR100846474B1 (en) 2008-07-17
US7230701B2 (en) 2007-06-12
FR2811761A1 (en) 2002-01-18
JP2004504591A (en) 2004-02-12
EP1301764A1 (en) 2003-04-16
EP1301763A2 (en) 2003-04-16
WO2002006779A3 (en) 2002-03-28
KR20030026322A (en) 2003-03-31
FR2811761B1 (en) 2002-10-11
WO2002006779A2 (en) 2002-01-24
JP2004504590A (en) 2004-02-12
WO2002006780A1 (en) 2002-01-24
KR20030022292A (en) 2003-03-15
US20040027571A1 (en) 2004-02-12
US20040070760A1 (en) 2004-04-15

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