AU2001275896A1 - Optical mems switching array with embedded beam-confining channels and method ofoperating same - Google Patents
Optical mems switching array with embedded beam-confining channels and method ofoperating sameInfo
- Publication number
- AU2001275896A1 AU2001275896A1 AU2001275896A AU7589601A AU2001275896A1 AU 2001275896 A1 AU2001275896 A1 AU 2001275896A1 AU 2001275896 A AU2001275896 A AU 2001275896A AU 7589601 A AU7589601 A AU 7589601A AU 2001275896 A1 AU2001275896 A1 AU 2001275896A1
- Authority
- AU
- Australia
- Prior art keywords
- mirrors
- optical signal
- optical
- same
- confining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H67/00—Electrically-operated selector switches
- H01H67/22—Switches without multi-position wipers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
- Spectrometry And Color Measurement (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21726500P | 2000-07-11 | 2000-07-11 | |
US60217265 | 2000-07-11 | ||
PCT/US2001/021856 WO2002005012A2 (en) | 2000-07-11 | 2001-07-11 | Optical mems switching array with embedded beam-confining channels and method of operating same |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001275896A1 true AU2001275896A1 (en) | 2002-01-21 |
Family
ID=22810321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001275896A Abandoned AU2001275896A1 (en) | 2000-07-11 | 2001-07-11 | Optical mems switching array with embedded beam-confining channels and method ofoperating same |
Country Status (11)
Country | Link |
---|---|
EP (1) | EP1299761B1 (ko) |
JP (1) | JP2004503801A (ko) |
KR (1) | KR20030015886A (ko) |
CN (1) | CN100405121C (ko) |
AT (1) | ATE328301T1 (ko) |
AU (1) | AU2001275896A1 (ko) |
DE (1) | DE60120167T2 (ko) |
DK (1) | DK1299761T3 (ko) |
ES (1) | ES2263639T3 (ko) |
PT (1) | PT1299761E (ko) |
WO (1) | WO2002005012A2 (ko) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6801682B2 (en) | 2001-05-18 | 2004-10-05 | Adc Telecommunications, Inc. | Latching apparatus for a MEMS optical switch |
US20030137374A1 (en) | 2002-01-18 | 2003-07-24 | Meichun Ruan | Micro-Magnetic Latching switches with a three-dimensional solenoid coil |
FR2835062B1 (fr) * | 2002-01-18 | 2004-06-25 | Teem Photonics | Commutateur optique a micro-miroir et son procede de realisation |
FR2838526B1 (fr) * | 2002-04-11 | 2004-07-02 | Memscap | Matrice de commutateurs optiques et procede de fabrication d'une telle matrice |
US6873398B2 (en) | 2003-05-21 | 2005-03-29 | Esko-Graphics A/S | Method and apparatus for multi-track imaging using single-mode beams and diffraction-limited optics |
EP1646926A2 (en) | 2003-07-18 | 2006-04-19 | Cytokinetics, Inc. | Characterizing biological stimuli by response curves |
KR100631835B1 (ko) | 2004-03-22 | 2006-10-09 | 삼성전기주식회사 | 컨티레버형 plc 광 감쇠기 및 그 제조방법 |
KR100724740B1 (ko) | 2005-09-08 | 2007-06-04 | 삼성전자주식회사 | 미러 패키지 및 광 스캐너 |
JP4599256B2 (ja) * | 2005-09-09 | 2010-12-15 | 株式会社東芝 | 磁気スイッチング素子及びこれを用いた信号処理装置 |
CN101168434B (zh) * | 2006-10-24 | 2011-06-15 | 精工爱普生株式会社 | Mems器件 |
DE102008001038B4 (de) * | 2008-04-08 | 2016-08-11 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Schrägstruktur und entsprechendes Herstellungsverfahren |
CN101719575B (zh) * | 2010-01-13 | 2012-08-29 | 上海交通大学 | 电热驱动的面内双稳态射频微开关 |
CN103048783A (zh) * | 2012-12-21 | 2013-04-17 | 无锡微奥科技有限公司 | 一种热驱动mems微镜 |
CN103905009A (zh) * | 2012-12-27 | 2014-07-02 | 精工爱普生株式会社 | 振子、振荡器、电子设备、移动体和振子的制造方法 |
JP2014212410A (ja) * | 2013-04-18 | 2014-11-13 | セイコーエプソン株式会社 | 振動子、発振器、電子機器、移動体、および振動子の製造方法 |
NZ745549A (en) * | 2016-03-01 | 2020-03-27 | Magic Leap Inc | Reflective switching device for inputting different wavelengths of light into waveguides |
CN105858590B (zh) * | 2016-06-02 | 2017-08-25 | 苏州科技学院 | Mems电磁力驱动器及其制备方法 |
US10825628B2 (en) | 2017-07-17 | 2020-11-03 | Analog Devices Global Unlimited Company | Electromagnetically actuated microelectromechanical switch |
CN109687059B (zh) * | 2018-12-25 | 2023-10-24 | 苏州磁明科技有限公司 | 具有柔性限位带的同轴射频开关及限位带制造方法 |
CN111398014B (zh) * | 2020-03-30 | 2020-12-08 | 河海大学 | 一种磁悬浮式土体剪切型断裂试验的矫正方法 |
CN111474633B (zh) * | 2020-05-26 | 2022-06-03 | 上海工程技术大学 | 一种电磁式双反射镜mems光开关 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4496211A (en) * | 1980-12-05 | 1985-01-29 | Maurice Daniel | Lightpipe network with optical devices for distributing electromagnetic radiation |
US5048912A (en) * | 1988-03-09 | 1991-09-17 | Fujitsu Limited | Optical fiber switching with spherical lens and method of making same |
US5042889A (en) * | 1990-04-09 | 1991-08-27 | At&T Bell Laboratories | Magnetic activation mechanism for an optical switch |
JPH04275519A (ja) * | 1991-03-04 | 1992-10-01 | Nippon Telegr & Teleph Corp <Ntt> | 光マトリックススイッチ |
US5847631A (en) * | 1995-10-10 | 1998-12-08 | Georgia Tech Research Corporation | Magnetic relay system and method capable of microfabrication production |
JP4001436B2 (ja) * | 1998-07-23 | 2007-10-31 | 三菱電機株式会社 | 光スイッチ及び光スイッチを用いた光路切換装置 |
-
2001
- 2001-07-11 CN CNB018149235A patent/CN100405121C/zh not_active Expired - Fee Related
- 2001-07-11 EP EP01953448A patent/EP1299761B1/en not_active Expired - Lifetime
- 2001-07-11 ES ES01953448T patent/ES2263639T3/es not_active Expired - Lifetime
- 2001-07-11 DE DE60120167T patent/DE60120167T2/de not_active Expired - Lifetime
- 2001-07-11 AU AU2001275896A patent/AU2001275896A1/en not_active Abandoned
- 2001-07-11 PT PT01953448T patent/PT1299761E/pt unknown
- 2001-07-11 JP JP2002509820A patent/JP2004503801A/ja active Pending
- 2001-07-11 KR KR10-2003-7000459A patent/KR20030015886A/ko not_active Application Discontinuation
- 2001-07-11 WO PCT/US2001/021856 patent/WO2002005012A2/en active IP Right Grant
- 2001-07-11 DK DK01953448T patent/DK1299761T3/da active
- 2001-07-11 AT AT01953448T patent/ATE328301T1/de active
Also Published As
Publication number | Publication date |
---|---|
DE60120167T2 (de) | 2007-05-24 |
EP1299761A2 (en) | 2003-04-09 |
EP1299761B1 (en) | 2006-05-31 |
WO2002005012A2 (en) | 2002-01-17 |
DE60120167D1 (de) | 2006-07-06 |
CN100405121C (zh) | 2008-07-23 |
ES2263639T3 (es) | 2006-12-16 |
PT1299761E (pt) | 2006-10-31 |
JP2004503801A (ja) | 2004-02-05 |
DK1299761T3 (da) | 2006-10-02 |
WO2002005012A3 (en) | 2002-06-27 |
CN1668957A (zh) | 2005-09-14 |
ATE328301T1 (de) | 2006-06-15 |
KR20030015886A (ko) | 2003-02-25 |
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