AU2001274436A1 - Rf current sensor - Google Patents

Rf current sensor

Info

Publication number
AU2001274436A1
AU2001274436A1 AU2001274436A AU7443601A AU2001274436A1 AU 2001274436 A1 AU2001274436 A1 AU 2001274436A1 AU 2001274436 A AU2001274436 A AU 2001274436A AU 7443601 A AU7443601 A AU 7443601A AU 2001274436 A1 AU2001274436 A1 AU 2001274436A1
Authority
AU
Australia
Prior art keywords
current sensor
sensor
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001274436A
Other languages
English (en)
Inventor
Michael B. Hopkins
Francisco Martinez
Ciaran O'morain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Scientific Systems Research Ltd
Original Assignee
SCIENT SYSTEMS RES Ltd
Scientific Systems Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCIENT SYSTEMS RES Ltd, Scientific Systems Research Ltd filed Critical SCIENT SYSTEMS RES Ltd
Publication of AU2001274436A1 publication Critical patent/AU2001274436A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/18—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers
    • G01R15/181—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers using coils without a magnetic core, e.g. Rogowski coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/142—Arrangements for simultaneous measurements of several parameters employing techniques covered by groups G01R15/14 - G01R15/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
AU2001274436A 2000-06-20 2001-06-18 Rf current sensor Abandoned AU2001274436A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IE20000499 2000-06-20
IE2000/0499 2000-06-20
PCT/IE2001/000084 WO2001098789A1 (fr) 2000-06-20 2001-06-18 Detecteur de courant rf

Publications (1)

Publication Number Publication Date
AU2001274436A1 true AU2001274436A1 (en) 2002-01-02

Family

ID=11042636

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001274436A Abandoned AU2001274436A1 (en) 2000-06-20 2001-06-18 Rf current sensor

Country Status (3)

Country Link
US (1) US6501285B1 (fr)
AU (1) AU2001274436A1 (fr)
WO (1) WO2001098789A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2875304B1 (fr) * 2004-09-16 2006-12-22 Ecole Polytechnique Etablissem Sonde de mesure de caracteristiques d'un courant d'excitation d'un plasma, et reacteur a plasma associe
US20060084397A1 (en) * 2004-09-30 2006-04-20 Turner Terry R Shielding assembly for an RF sensor current transducer
US7403764B2 (en) * 2004-11-30 2008-07-22 Turner Terry R RF power delivery diagnostic system
US7538562B2 (en) 2006-03-20 2009-05-26 Inficon, Inc. High performance miniature RF sensor for use in microelectronics plasma processing tools
US7821250B2 (en) * 2006-07-31 2010-10-26 Inficon, Inc. RF sensor clamp assembly
CN101566642B (zh) 2008-04-10 2013-11-20 Mks仪器有限公司 具有高动态范围的正交射频电压/电流传感器
US9291649B2 (en) * 2012-08-16 2016-03-22 Mks Instruments, Inc. On the enhancements of planar based RF sensor technology
US9880213B2 (en) 2013-08-19 2018-01-30 Oes, Inc. Conductor monitor device and method
US9945892B2 (en) 2013-08-19 2018-04-17 Oes, Inc. Wire processing machine including a conductor monitor device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041791A (en) * 1989-08-07 1991-08-20 Washington University Magnetic resonance RF probe with electromagnetically isolated transmitter and receiver coils
KR0184675B1 (ko) 1991-07-24 1999-04-15 이노우에 쥰이치 챔버내의 전극에 있어서의 실제의 rf파워를 검출 및 제어 가능한 플라즈마 처리장치
US5467013A (en) 1993-12-07 1995-11-14 Sematech, Inc. Radio frequency monitor for semiconductor process control
JPH07183468A (ja) 1993-12-22 1995-07-21 Tokin Corp 絶縁シリコン基板並びにそれを用いたインダクタおよび分布定数型フィルタ
US5764052A (en) * 1995-06-16 1998-06-09 Pacesetter, Inc. Coil return energy measurement magnetic field sensor and method thereof
US5866985A (en) 1996-12-03 1999-02-02 International Business Machines Corporation Stable matching networks for plasma tools
US5910011A (en) 1997-05-12 1999-06-08 Applied Materials, Inc. Method and apparatus for monitoring processes using multiple parameters of a semiconductor wafer processing system
JP3303760B2 (ja) 1998-01-16 2002-07-22 日本電気株式会社 プリント回路基板およびその設計方法およびプリント回路基板の配線パターン作製装置

Also Published As

Publication number Publication date
WO2001098789A1 (fr) 2001-12-27
US6501285B1 (en) 2002-12-31

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