AU2001273219A1 - Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly - Google Patents

Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly

Info

Publication number
AU2001273219A1
AU2001273219A1 AU2001273219A AU7321901A AU2001273219A1 AU 2001273219 A1 AU2001273219 A1 AU 2001273219A1 AU 2001273219 A AU2001273219 A AU 2001273219A AU 7321901 A AU7321901 A AU 7321901A AU 2001273219 A1 AU2001273219 A1 AU 2001273219A1
Authority
AU
Australia
Prior art keywords
workpiece
processing
microelectronic
cassette inventory
inventory assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001273219A
Inventor
Kyle M. Hanson
John M. Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semitool Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semitool Inc filed Critical Semitool Inc
Publication of AU2001273219A1 publication Critical patent/AU2001273219A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
AU2001273219A 2000-07-07 2001-07-06 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly Abandoned AU2001273219A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/611,860 2000-07-07
US09/611,860 US6471460B1 (en) 1996-07-15 2000-07-07 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly
PCT/US2001/021390 WO2002005314A2 (en) 2000-07-07 2001-07-06 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly

Publications (1)

Publication Number Publication Date
AU2001273219A1 true AU2001273219A1 (en) 2002-01-21

Family

ID=24450675

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001273219A Abandoned AU2001273219A1 (en) 2000-07-07 2001-07-06 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly

Country Status (4)

Country Link
US (1) US6471460B1 (en)
AU (1) AU2001273219A1 (en)
TW (1) TW505961B (en)
WO (1) WO2002005314A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040080852A1 (en) * 2002-10-18 2004-04-29 Seagate Technology Llc Disc caddy feeder system with caddy gripper for data storage devices
US7165303B2 (en) * 2002-12-16 2007-01-23 Seagate Technology Llc Disc cassette delidder and feeder system for data storage devices
JP4045451B2 (en) * 2003-12-26 2008-02-13 村田機械株式会社 Overhead traveling vehicle system
KR101803111B1 (en) * 2010-01-08 2017-11-29 케이엘에이-텐코 코포레이션 Dual tray carrier unit
US8496790B2 (en) * 2011-05-18 2013-07-30 Applied Materials, Inc. Electrochemical processor
CN103177985B (en) * 2011-12-26 2016-08-03 北京七星华创电子股份有限公司 Semiconductor wafer fabrication device
US20220037178A1 (en) * 2020-07-31 2022-02-03 Taiwan Semiconductor Manufacturing Company Limited Semiconductor storage apparatus with integrated sorter

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04298059A (en) * 1991-03-27 1992-10-21 Hitachi Ltd Vacuum processor
JPH0547896A (en) * 1991-08-12 1993-02-26 Mitsubishi Electric Corp Wafer cassette stocker
JP3258748B2 (en) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 Heat treatment equipment
US5527390A (en) * 1993-03-19 1996-06-18 Tokyo Electron Kabushiki Treatment system including a plurality of treatment apparatus
US6279724B1 (en) * 1997-12-19 2001-08-28 Semitoll Inc. Automated semiconductor processing system
US6091498A (en) 1996-07-15 2000-07-18 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
JPH10139159A (en) * 1996-11-13 1998-05-26 Tokyo Electron Ltd Cassette chamber and cassette carrying-in and out mechanism
JPH1159829A (en) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp Semiconductor wafer cassette conveyer, stocker used in semiconductor wafer cassette conveyer, and stocker in/out stock work control method/device used in semiconductor wafer cassette conveyer
US6102647A (en) * 1998-06-26 2000-08-15 Intel Corporation Cart for transferring objects
US6283692B1 (en) * 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette

Also Published As

Publication number Publication date
TW505961B (en) 2002-10-11
WO2002005314A3 (en) 2002-04-18
US6471460B1 (en) 2002-10-29
WO2002005314A2 (en) 2002-01-17
WO2002005314A9 (en) 2003-02-06

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