AU2001271511A1 - Fabrication of gratings in planar waveguide devices - Google Patents

Fabrication of gratings in planar waveguide devices

Info

Publication number
AU2001271511A1
AU2001271511A1 AU2001271511A AU7151101A AU2001271511A1 AU 2001271511 A1 AU2001271511 A1 AU 2001271511A1 AU 2001271511 A AU2001271511 A AU 2001271511A AU 7151101 A AU7151101 A AU 7151101A AU 2001271511 A1 AU2001271511 A1 AU 2001271511A1
Authority
AU
Australia
Prior art keywords
gratings
fabrication
planar waveguide
waveguide devices
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001271511A
Inventor
Jean-Marie G. Alibert
Nikolaus Boos
Mark D. Salik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of AU2001271511A1 publication Critical patent/AU2001271511A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
AU2001271511A 2000-09-06 2001-06-26 Fabrication of gratings in planar waveguide devices Abandoned AU2001271511A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00402451A EP1186916A1 (en) 2000-09-06 2000-09-06 Fabrication of gratings in planar waveguide devices
EP00402451 2000-09-06
PCT/US2001/020403 WO2002020283A1 (en) 2000-09-06 2001-06-26 Fabrication of gratings in planar waveguide devices

Publications (1)

Publication Number Publication Date
AU2001271511A1 true AU2001271511A1 (en) 2002-03-22

Family

ID=8173846

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001271511A Abandoned AU2001271511A1 (en) 2000-09-06 2001-06-26 Fabrication of gratings in planar waveguide devices

Country Status (5)

Country Link
US (1) US6428944B1 (en)
EP (1) EP1186916A1 (en)
AU (1) AU2001271511A1 (en)
TW (1) TW508463B (en)
WO (1) WO2002020283A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6593062B1 (en) * 2001-12-07 2003-07-15 Sandia Corporation Formation of bulk refractive index structures
GB0206483D0 (en) * 2002-03-19 2002-05-01 Denselight Semiconductors Pte Gratings on planar lightwave circuits
US7006753B2 (en) * 2002-12-18 2006-02-28 General Electric Company Optical waveguide devices with deuterated amorphous carbon core structures
US7292753B2 (en) * 2005-12-21 2007-11-06 Intel Corporation Dual core corrugated Bragg grating
US7961765B2 (en) * 2009-03-31 2011-06-14 Intel Corporation Narrow surface corrugated grating
WO2010138554A1 (en) * 2009-05-27 2010-12-02 Redfern Integrated Optics, Inc. Device fabrication with planar bragg gratings suppressing parasitic effects
JP2016173427A (en) * 2015-03-16 2016-09-29 株式会社東芝 Pattern formation method
JP2021504736A (en) * 2017-11-21 2021-02-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Manufacturing method of waveguide coupler
US11327218B2 (en) 2017-11-29 2022-05-10 Applied Materials, Inc. Method of direct etching fabrication of waveguide combiners
RU2707663C1 (en) * 2019-01-18 2019-11-28 Федеральное государственное бюджетное учреждение науки Институт Ядерной Физики им. Г.И. Будкера Сибирского отделения (ИЯФ СО РАН) Method of making a bragg structure with a corrugated surface

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178978A (en) * 1990-09-06 1993-01-12 The United States Of America As Represented By The Secretary Of The Air Force Fabricating integrated optics
JPH0627338A (en) * 1992-07-08 1994-02-04 Nippon Telegr & Teleph Corp <Ntt> Optical multiplexer/demultiplexer and its manufacture
US5371817A (en) * 1993-02-16 1994-12-06 Eastman Kodak Company Multichannel optical waveguide page scanner with individually addressable electro-optic modulators
US5550088A (en) * 1993-06-02 1996-08-27 Lucent Technologies Inc. Fabrication process for a self-aligned optical subassembly
US5471552A (en) * 1995-02-22 1995-11-28 Industrial Technology Research Institute Fabrication of static-alignment fiber-guiding grooves for planar lightwave circuits
US5915051A (en) * 1997-01-21 1999-06-22 Massascusetts Institute Of Technology Wavelength-selective optical add/drop switch
CA2259350A1 (en) * 1999-01-20 2000-07-20 Hamid Hatami-Hanza Method for volume production of optical grating devices with tuning capability

Also Published As

Publication number Publication date
EP1186916A1 (en) 2002-03-13
TW508463B (en) 2002-11-01
US20020027126A1 (en) 2002-03-07
WO2002020283A1 (en) 2002-03-14
US6428944B1 (en) 2002-08-06

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