AU2001270136A1 - Fluid media particle isolating system - Google Patents

Fluid media particle isolating system

Info

Publication number
AU2001270136A1
AU2001270136A1 AU2001270136A AU7013601A AU2001270136A1 AU 2001270136 A1 AU2001270136 A1 AU 2001270136A1 AU 2001270136 A AU2001270136 A AU 2001270136A AU 7013601 A AU7013601 A AU 7013601A AU 2001270136 A1 AU2001270136 A1 AU 2001270136A1
Authority
AU
Australia
Prior art keywords
fluid media
media particle
isolating system
particle isolating
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001270136A
Inventor
Paul S. Whalen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intrabay Automation Inc
Original Assignee
Intrabay Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intrabay Automation Inc filed Critical Intrabay Automation Inc
Publication of AU2001270136A1 publication Critical patent/AU2001270136A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/18—Work bench
AU2001270136A 2000-08-08 2001-06-22 Fluid media particle isolating system Abandoned AU2001270136A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/634,032 US6368372B1 (en) 2000-08-08 2000-08-08 Fluid media particle isolating system
US09634032 2000-08-08
PCT/US2001/020160 WO2002011858A1 (en) 2000-08-08 2001-06-22 Fluid media particle isolating system

Publications (1)

Publication Number Publication Date
AU2001270136A1 true AU2001270136A1 (en) 2002-02-18

Family

ID=24542158

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001270136A Abandoned AU2001270136A1 (en) 2000-08-08 2001-06-22 Fluid media particle isolating system

Country Status (8)

Country Link
US (3) US6368372B1 (en)
EP (1) EP1313540A4 (en)
JP (1) JP2004510322A (en)
KR (1) KR20030059094A (en)
CN (1) CN1468133A (en)
AU (1) AU2001270136A1 (en)
CA (1) CA2418428A1 (en)
WO (1) WO2002011858A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6368372B1 (en) * 2000-08-08 2002-04-09 Intrabay Automation, Inc. Fluid media particle isolating system
US20030037801A1 (en) * 2001-08-27 2003-02-27 Applied Materials, Inc. Method for increasing the efficiency of substrate processing chamber contamination detection
US6725564B2 (en) * 2001-08-27 2004-04-27 Applied Materials, Inc. Processing platform with integrated particle removal system
US20030037800A1 (en) * 2001-08-27 2003-02-27 Applied Materials, Inc. Method for removing contamination particles from substrate processing chambers
TWI281773B (en) * 2004-02-25 2007-05-21 Delta Electronics Inc A real-time stopping fan method and structure thereof
CN100340365C (en) * 2004-09-30 2007-10-03 北京科技大学 Preparation of low-temperature primary sintering high-density superfine crystal particle pure tungsten material
DE102006002296B3 (en) * 2006-01-18 2007-07-26 Dr. Boy Gmbh & Co. Kg Control system and control method for injection molding machines
JP2008082285A (en) * 2006-09-28 2008-04-10 Techno Takatsuki Co Ltd Dust collecting mechanism of air pump
CN105298830B (en) * 2015-09-17 2018-10-23 沈阳拓荆科技有限公司 A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724874A (en) * 1986-05-01 1988-02-16 Asyst Technologies Sealable transportable container having a particle filtering system
DE3637880C2 (en) * 1986-11-06 1994-09-01 Meissner & Wurst Transportable container for handling semiconductor elements during their manufacture as well as methods for the particle-free delivery of products
US5261935A (en) * 1990-09-26 1993-11-16 Tokyo Electron Sagami Limited Clean air apparatus
US5181819A (en) * 1990-10-09 1993-01-26 Tokyo Electron Sagami Limited Apparatus for processing semiconductors
KR0167476B1 (en) * 1990-09-27 1999-02-01 이노우에 다케시 Vertical heat treating apparatus
JP3334929B2 (en) * 1993-02-04 2002-10-15 東京エレクトロン株式会社 Heat treatment equipment
GB9510079D0 (en) * 1995-05-18 1995-07-12 British Nuclear Fuels Plc Air extract system for a containment
JP3218425B2 (en) * 1996-03-25 2001-10-15 東京エレクトロン株式会社 Processing method and processing apparatus
JP3991375B2 (en) * 1996-11-13 2007-10-17 東京エレクトロン株式会社 Trap device
US6050891A (en) * 1998-02-06 2000-04-18 Applied Materials, Inc. Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment
US6368372B1 (en) * 2000-08-08 2002-04-09 Intrabay Automation, Inc. Fluid media particle isolating system

Also Published As

Publication number Publication date
KR20030059094A (en) 2003-07-07
US6540803B2 (en) 2003-04-01
EP1313540A4 (en) 2004-11-17
WO2002011858A1 (en) 2002-02-14
US20030200735A1 (en) 2003-10-30
CN1468133A (en) 2004-01-14
JP2004510322A (en) 2004-04-02
US20020112457A1 (en) 2002-08-22
EP1313540A1 (en) 2003-05-28
US6368372B1 (en) 2002-04-09
CA2418428A1 (en) 2002-02-14

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