AU2001266921A1 - Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope - Google Patents

Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope

Info

Publication number
AU2001266921A1
AU2001266921A1 AU2001266921A AU6692101A AU2001266921A1 AU 2001266921 A1 AU2001266921 A1 AU 2001266921A1 AU 2001266921 A AU2001266921 A AU 2001266921A AU 6692101 A AU6692101 A AU 6692101A AU 2001266921 A1 AU2001266921 A1 AU 2001266921A1
Authority
AU
Australia
Prior art keywords
dopants
spectroscopy
measure
alternating current
difference frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001266921A
Inventor
Gregory S. Mccarty
Paul S. Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Penn State Research Foundation
Atolytics Inc
Original Assignee
Penn State Research Foundation
Atolytics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Penn State Research Foundation, Atolytics Inc filed Critical Penn State Research Foundation
Publication of AU2001266921A1 publication Critical patent/AU2001266921A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y10S977/854—Semiconductor sample
AU2001266921A 2000-06-15 2001-06-15 Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope Abandoned AU2001266921A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21159200P 2000-06-15 2000-06-15
US60/211,592 2000-06-15
PCT/US2001/019127 WO2001096888A2 (en) 2000-06-15 2001-06-15 Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope

Publications (1)

Publication Number Publication Date
AU2001266921A1 true AU2001266921A1 (en) 2001-12-24

Family

ID=22787557

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001266921A Abandoned AU2001266921A1 (en) 2000-06-15 2001-06-15 Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope

Country Status (3)

Country Link
US (1) US6597194B2 (en)
AU (1) AU2001266921A1 (en)
WO (1) WO2001096888A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7856665B2 (en) * 2006-11-15 2010-12-21 Asylum Research Corporation Apparatus and method for scanning capacitance microscopy and spectroscopy
US8471580B2 (en) * 2009-03-31 2013-06-25 Agilent Technologies, Inc. Dopant profile measurement module, method and apparatus
US8315819B1 (en) * 2009-09-25 2012-11-20 Agilent Technologies, Inc. Method and apparatus for determining dopant density in semiconductor devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus
US4325025A (en) * 1980-05-22 1982-04-13 International Business Machines Corporation Automated channel doping measuring circuit
US5504366A (en) 1992-07-17 1996-04-02 Biotechnology Research And Development Corp. System for analyzing surfaces of samples
US5397896A (en) 1992-07-17 1995-03-14 Penn State Research Foundation And Biotechnology Research And Development Corporation Multiple source and detection frequencies in detecting threshold phenomena associated with and/or atomic or molecular spectra
US5268573A (en) 1992-07-17 1993-12-07 The Penn State Research Foundation System for detecting threshold phenomena associated with and/or atomic or molecular spectra of a substance
US5661301A (en) 1996-02-07 1997-08-26 The Penn State Research Foundation Spectroscopy and mapping of atoms, molecules and surface features via difference frequency generation with a scanning tunneling microscope or related instruments

Also Published As

Publication number Publication date
US6597194B2 (en) 2003-07-22
WO2001096888A9 (en) 2002-10-10
WO2001096888A3 (en) 2002-05-23
US20020033708A1 (en) 2002-03-21
WO2001096888A2 (en) 2001-12-20

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