AU2001265237A1 - Self teaching robotic carrier handling system - Google Patents

Self teaching robotic carrier handling system

Info

Publication number
AU2001265237A1
AU2001265237A1 AU2001265237A AU6523701A AU2001265237A1 AU 2001265237 A1 AU2001265237 A1 AU 2001265237A1 AU 2001265237 A AU2001265237 A AU 2001265237A AU 6523701 A AU6523701 A AU 6523701A AU 2001265237 A1 AU2001265237 A1 AU 2001265237A1
Authority
AU
Australia
Prior art keywords
carrier
buffer
input
calibration
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001265237A
Inventor
Sanjay K. Aggarwal
Nathan H. Harding
Paul Sagues
Robert T. Wiggers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berkeley Process Control Inc
Original Assignee
Berkeley Process Control Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkeley Process Control Inc filed Critical Berkeley Process Control Inc
Publication of AU2001265237A1 publication Critical patent/AU2001265237A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

Briefly, a preferred embodiment of the present invention includes a wafer carrier buffer for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer has a sliding carrier first input apparatus for taking a carrier from outside the buffer through a buffer input door and into the buffer interior. A buffer controller is included for directing robotic apparatus to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for delivery of wafers to processing. The robotic apparatus also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need of calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.
AU2001265237A 2000-06-13 2001-05-30 Self teaching robotic carrier handling system Abandoned AU2001265237A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09592314 2000-06-13
US09/592,314 US6304051B1 (en) 1999-03-15 2000-06-13 Self teaching robotic carrier handling system
PCT/US2001/017576 WO2001096884A1 (en) 2000-06-13 2001-05-30 Self teaching robotic carrier handling system

Publications (1)

Publication Number Publication Date
AU2001265237A1 true AU2001265237A1 (en) 2001-12-24

Family

ID=24370171

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001265237A Abandoned AU2001265237A1 (en) 2000-06-13 2001-05-30 Self teaching robotic carrier handling system

Country Status (7)

Country Link
US (1) US6304051B1 (en)
EP (1) EP1290452B1 (en)
JP (1) JP4979110B2 (en)
AT (1) ATE377259T1 (en)
AU (1) AU2001265237A1 (en)
DE (1) DE60131162T2 (en)
WO (1) WO2001096884A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506009B1 (en) * 2000-03-16 2003-01-14 Applied Materials, Inc. Apparatus for storing and moving a cassette
US20030110649A1 (en) * 2001-12-19 2003-06-19 Applied Materials, Inc. Automatic calibration method for substrate carrier handling robot and jig for performing the method
US6822413B2 (en) * 2002-03-20 2004-11-23 Fsi International, Inc. Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector
TWI286989B (en) 2002-06-19 2007-09-21 Brooks Automation Inc Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US20040081546A1 (en) * 2002-08-31 2004-04-29 Applied Materials, Inc. Method and apparatus for supplying substrates to a processing tool
FR2844258B1 (en) * 2002-09-06 2005-06-03 Recif Sa SYSTEM FOR TRANSPORTING AND STORING SEMICONDUCTOR PLATE CONTAINERS, AND TRANSFER MECHANISM
US10957569B2 (en) 2002-10-11 2021-03-23 Murata Machinery Ltd. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
US6996456B2 (en) * 2002-10-21 2006-02-07 Fsi International, Inc. Robot with tactile sensor device
US7230702B2 (en) * 2003-11-13 2007-06-12 Applied Materials, Inc. Monitoring of smart pin transition timing
KR20070054683A (en) 2004-08-23 2007-05-29 브룩스 오토메이션 인코퍼레이티드 Elevator-based tool loading and buffering system
JP4670808B2 (en) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 Container transport system and measuring container
CH699754B1 (en) * 2008-10-20 2020-11-13 Tec Sem Ag Storage device for temporary storage of objects for the production of semiconductor components
US8459922B2 (en) 2009-11-13 2013-06-11 Brooks Automation, Inc. Manipulator auto-teach and position correction system
US8692503B2 (en) * 2009-12-18 2014-04-08 Varian Medical Systems, Inc. Homing and establishing reference frames for motion axes in radiation systems
US9196518B1 (en) * 2013-03-15 2015-11-24 Persimmon Technologies, Corp. Adaptive placement system and method
WO2016077387A1 (en) 2014-11-10 2016-05-19 Brooks Automation, Inc. Tool auto-teach method and apparatus
CN107107336B (en) 2014-11-18 2021-04-02 柿子技术公司 Robot adaptive placement system with end effector position estimation
US10065319B2 (en) * 2015-11-30 2018-09-04 Delta Electronics, Inc. Tool calibration apparatus of robot manipulator
KR102166345B1 (en) * 2018-10-05 2020-10-15 세메스 주식회사 Stocker
KR102150670B1 (en) * 2018-11-01 2020-09-01 세메스 주식회사 Stocker
WO2020102222A1 (en) * 2018-11-12 2020-05-22 Bpm Microsystems, Inc. Automated teaching of pick and place workflow locations on an automated programming system
KR102246792B1 (en) * 2020-10-08 2021-04-30 세메스 주식회사 Stocker

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0790494B2 (en) * 1987-08-22 1995-10-04 ファナック株式会社 Calibration method of visual sensor
US5019233A (en) * 1988-10-31 1991-05-28 Eaton Corporation Sputtering system
JPH06110543A (en) * 1992-09-30 1994-04-22 Nippon Telegr & Teleph Corp <Ntt> Direct teaching device
US5535306A (en) * 1993-01-28 1996-07-09 Applied Materials Inc. Self-calibration system for robot mechanisms
US5563798A (en) * 1994-04-05 1996-10-08 Applied Materials, Inc. Wafer positioning system
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
NL1006461C2 (en) * 1997-07-03 1999-01-05 Asm Int Storage assembly for wafers.
US6164894A (en) * 1997-11-04 2000-12-26 Cheng; David Method and apparatus for integrated wafer handling and testing
US6079927A (en) * 1998-04-22 2000-06-27 Varian Semiconductor Equipment Associates, Inc. Automated wafer buffer for use with wafer processing equipment
US6323616B1 (en) * 1999-03-15 2001-11-27 Berkeley Process Control, Inc. Self teaching robotic wafer handling system
US6075334A (en) * 1999-03-15 2000-06-13 Berkeley Process Control, Inc Automatic calibration system for wafer transfer robot
JP2001202123A (en) * 2000-01-18 2001-07-27 Sony Corp Method for teaching carrier robot

Also Published As

Publication number Publication date
WO2001096884A1 (en) 2001-12-20
JP2004503926A (en) 2004-02-05
US6304051B1 (en) 2001-10-16
EP1290452B1 (en) 2007-10-31
EP1290452A4 (en) 2006-06-21
ATE377259T1 (en) 2007-11-15
DE60131162D1 (en) 2007-12-13
DE60131162T2 (en) 2008-08-14
EP1290452A1 (en) 2003-03-12
JP4979110B2 (en) 2012-07-18

Similar Documents

Publication Publication Date Title
AU2001265237A1 (en) Self teaching robotic carrier handling system
WO2002101792A3 (en) Method and apparatus for alignment of automated workpiece handling systems
US9665946B2 (en) Article conveyor system
GB2384309A8 (en) High throughput processing system and method of using
EP0810066A3 (en) Automated wafer lapping system
SG150489A1 (en) Method and apparatus for robot calibrations with a calibrating device
GB2288253A (en) Method and apparatus for belt conveyor load tracking
KR950015707A (en) A resist processing apparatus, a substrate processing apparatus, and the conveyance method of a to-be-processed object
TW200717693A (en) Wafer position teaching method and teaching tool
TW201546943A (en) Method and apparatus for detecting position of substrate transfer device, and storage medium
US10882697B2 (en) Storage apparatus and storage method
KR100278601B1 (en) Apparatus for transferring material and method for transferring material using it
EP1519375A3 (en) System and method for library inventory
EP1061558A3 (en) Edge contact loadcup
WO2004043831A3 (en) Systems and methods of sorting samples
JP2004503926A5 (en)
TW200516360A (en) Control method and system for an automated material handling system
MY126726A (en) Pick and place apparatus for transferring objects
TW345566B (en) Control system for use with semiconductor device transporting and handling apparatus
KR20190070280A (en) Teaching method of conveying apparatus
JPH0623684A (en) Work transfer robot with visual processing function
EP1617461A3 (en) Measurement station and processing station for semiconductor wafers
JPS62136402A (en) Device for conveying and storing article
WO2002013244A3 (en) Apparatus and method for handling and testing of wafers
KR20040009250A (en) Method and Device of sensing wafer&#39;s position of robot arm