AU2001258595A1 - Integrated resonator and amplifier system - Google Patents

Integrated resonator and amplifier system

Info

Publication number
AU2001258595A1
AU2001258595A1 AU2001258595A AU5859501A AU2001258595A1 AU 2001258595 A1 AU2001258595 A1 AU 2001258595A1 AU 2001258595 A AU2001258595 A AU 2001258595A AU 5859501 A AU5859501 A AU 5859501A AU 2001258595 A1 AU2001258595 A1 AU 2001258595A1
Authority
AU
Australia
Prior art keywords
amplifier system
integrated resonator
resonator
integrated
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001258595A
Inventor
Kourosh Saadatmand
Ernst Frederick Scherer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axcelis Technologies Inc
Original Assignee
Axcelis Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axcelis Technologies Inc filed Critical Axcelis Technologies Inc
Publication of AU2001258595A1 publication Critical patent/AU2001258595A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
AU2001258595A 2000-05-30 2001-05-22 Integrated resonator and amplifier system Abandoned AU2001258595A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09583157 2000-05-30
US09/583,157 US6653803B1 (en) 2000-05-30 2000-05-30 Integrated resonator and amplifier system
PCT/GB2001/002274 WO2001093646A2 (en) 2000-05-30 2001-05-22 Integrated resonator and amplifier system

Publications (1)

Publication Number Publication Date
AU2001258595A1 true AU2001258595A1 (en) 2001-12-11

Family

ID=24331908

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001258595A Abandoned AU2001258595A1 (en) 2000-05-30 2001-05-22 Integrated resonator and amplifier system

Country Status (8)

Country Link
US (1) US6653803B1 (en)
EP (1) EP1290927A2 (en)
JP (1) JP5007870B2 (en)
KR (1) KR20030007808A (en)
AU (1) AU2001258595A1 (en)
NZ (1) NZ522808A (en)
TW (1) TWI234419B (en)
WO (1) WO2001093646A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2380601A (en) * 2001-10-05 2003-04-09 Applied Materials Inc Radio frequency linear accelerator
KR101103737B1 (en) * 2009-12-24 2012-01-11 한국원자력연구원 An ion implantator using RF accelerating cavities
JP5812969B2 (en) * 2012-11-07 2015-11-17 三菱重工業株式会社 Accelerating tube
CN103561536A (en) * 2013-10-09 2014-02-05 中国科学院大连化学物理研究所 Device for connecting resistors with capacitor for accelerator
EP3536132B1 (en) * 2016-11-03 2022-03-16 Starfire Industries LLC A compact system for coupling rf power directly into an accelerator
US10763071B2 (en) 2018-06-01 2020-09-01 Varian Semiconductor Equipment Associates, Inc. Compact high energy ion implantation system
US11094504B2 (en) 2020-01-06 2021-08-17 Applied Materials, Inc. Resonator coil having an asymmetrical profile
US10943767B1 (en) * 2020-01-09 2021-03-09 Applied Materials, Inc. Digital sampling to control resonator frequency and phase in a LINAC

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL158378B (en) * 1950-01-12 Philips Nv VACUUM CLEANER.
US4363000A (en) * 1980-04-09 1982-12-07 Broadcast Electronics, Inc. Power amplifier tank circuit
US4667111C1 (en) * 1985-05-17 2001-04-10 Eaton Corp Cleveland Accelerator for ion implantation
JPH0693399B2 (en) * 1988-10-17 1994-11-16 工業技術院長 Variable-inductance quadrupole particle accelerator and high-frequency resonator used therefor
US5504341A (en) * 1995-02-17 1996-04-02 Zimec Consulting, Inc. Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system
JP3168903B2 (en) * 1996-02-29 2001-05-21 日新電機株式会社 High-frequency accelerator and method of using the same
JPH11214200A (en) * 1998-01-29 1999-08-06 Nissin Electric Co Ltd Charged particle accelerator
JP4038883B2 (en) * 1998-06-10 2008-01-30 日新電機株式会社 High frequency type accelerator tube
US6262638B1 (en) 1998-09-28 2001-07-17 Axcelis Technologies, Inc. Tunable and matchable resonator coil assembly for ion implanter linear accelerator

Also Published As

Publication number Publication date
US6653803B1 (en) 2003-11-25
JP2003535439A (en) 2003-11-25
WO2001093646A2 (en) 2001-12-06
WO2001093646A3 (en) 2002-03-28
TWI234419B (en) 2005-06-11
NZ522808A (en) 2004-06-25
KR20030007808A (en) 2003-01-23
EP1290927A2 (en) 2003-03-12
JP5007870B2 (en) 2012-08-22

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