AU2001249439A1 - Optical switch employing biased rotatable comb drive devices and methods - Google Patents

Optical switch employing biased rotatable comb drive devices and methods

Info

Publication number
AU2001249439A1
AU2001249439A1 AU2001249439A AU4943901A AU2001249439A1 AU 2001249439 A1 AU2001249439 A1 AU 2001249439A1 AU 2001249439 A AU2001249439 A AU 2001249439A AU 4943901 A AU4943901 A AU 4943901A AU 2001249439 A1 AU2001249439 A1 AU 2001249439A1
Authority
AU
Australia
Prior art keywords
methods
optical switch
drive devices
comb drive
switch employing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001249439A
Inventor
Behrang Behin
Satinderpall S. Pannu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onix Microsystems Inc
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Publication of AU2001249439A1 publication Critical patent/AU2001249439A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
AU2001249439A 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods Abandoned AU2001249439A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19185600P 2000-03-24 2000-03-24
US60191856 2000-03-24
PCT/US2001/009553 WO2001073935A2 (en) 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods

Publications (1)

Publication Number Publication Date
AU2001249439A1 true AU2001249439A1 (en) 2001-10-08

Family

ID=22707176

Family Applications (4)

Application Number Title Priority Date Filing Date
AU2001247702A Abandoned AU2001247702A1 (en) 2000-03-24 2001-03-22 Biased rotatable comb drive sensor methods
AU2001247770A Abandoned AU2001247770A1 (en) 2000-03-24 2001-03-23 Biased rotatable combdrive devices and methods
AU2001245984A Abandoned AU2001245984A1 (en) 2000-03-24 2001-03-23 Biased rotatable comb drive actuator methods
AU2001249439A Abandoned AU2001249439A1 (en) 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods

Family Applications Before (3)

Application Number Title Priority Date Filing Date
AU2001247702A Abandoned AU2001247702A1 (en) 2000-03-24 2001-03-22 Biased rotatable comb drive sensor methods
AU2001247770A Abandoned AU2001247770A1 (en) 2000-03-24 2001-03-23 Biased rotatable combdrive devices and methods
AU2001245984A Abandoned AU2001245984A1 (en) 2000-03-24 2001-03-23 Biased rotatable comb drive actuator methods

Country Status (4)

Country Link
US (2) US6629461B2 (en)
AU (4) AU2001247702A1 (en)
TW (1) TW523485B (en)
WO (4) WO2001076054A2 (en)

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Also Published As

Publication number Publication date
AU2001247702A1 (en) 2001-10-15
WO2001073936A2 (en) 2001-10-04
US20020026831A1 (en) 2002-03-07
WO2001076054A3 (en) 2002-04-18
WO2001073935A2 (en) 2001-10-04
WO2001076055A2 (en) 2001-10-11
WO2001073935A3 (en) 2002-04-18
AU2001247770A1 (en) 2001-10-08
US20010040419A1 (en) 2001-11-15
WO2001076054A2 (en) 2001-10-11
AU2001245984A1 (en) 2001-10-15
US6629461B2 (en) 2003-10-07
WO2001076055A3 (en) 2002-03-07
TW523485B (en) 2003-03-11
WO2001073936A3 (en) 2002-04-18

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