AU2001237770A1 - Plasma polymerization system and method for plasma polymerization - Google Patents

Plasma polymerization system and method for plasma polymerization

Info

Publication number
AU2001237770A1
AU2001237770A1 AU2001237770A AU3777001A AU2001237770A1 AU 2001237770 A1 AU2001237770 A1 AU 2001237770A1 AU 2001237770 A AU2001237770 A AU 2001237770A AU 3777001 A AU3777001 A AU 3777001A AU 2001237770 A1 AU2001237770 A1 AU 2001237770A1
Authority
AU
Australia
Prior art keywords
plasma polymerization
polymerization system
plasma
polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001237770A
Inventor
Sung-Hee Kang
Jeong-Kun Oh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of AU2001237770A1 publication Critical patent/AU2001237770A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment
    • B05D3/148—After-treatment affecting the surface properties of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
AU2001237770A 2000-03-10 2001-03-02 Plasma polymerization system and method for plasma polymerization Abandoned AU2001237770A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020000012101A KR20010088089A (en) 2000-03-10 2000-03-10 Method of improving hydrophile in plasma polymerization system
KR0012101 2000-03-10
PCT/KR2001/000322 WO2001066824A1 (en) 2000-03-10 2001-03-02 Plasma polymerization system and method for plasma polymerization

Publications (1)

Publication Number Publication Date
AU2001237770A1 true AU2001237770A1 (en) 2001-09-17

Family

ID=19654057

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001237770A Abandoned AU2001237770A1 (en) 2000-03-10 2001-03-02 Plasma polymerization system and method for plasma polymerization

Country Status (8)

Country Link
US (1) US20030221950A1 (en)
EP (1) EP1264005A4 (en)
JP (1) JP2003525979A (en)
KR (1) KR20010088089A (en)
CN (1) CN1219912C (en)
AU (1) AU2001237770A1 (en)
MX (1) MXPA02008855A (en)
WO (1) WO2001066824A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1354640A1 (en) * 2002-04-19 2003-10-22 Dürr Systems GmbH Process and apparatus for hardening a coating
JP2015188895A (en) * 2014-03-27 2015-11-02 三菱マテリアル株式会社 Pressure roll

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475307A (en) * 1965-02-04 1969-10-28 Continental Can Co Condensation of monomer vapors to increase polymerization rates in a glow discharge
US4588641A (en) * 1983-11-22 1986-05-13 Olin Corporation Three-step plasma treatment of copper foils to enhance their laminate adhesion
JPS63186862A (en) * 1987-01-28 1988-08-02 Nisshin Steel Co Ltd Formation of organic thin film on metallic base material
JP2811820B2 (en) * 1989-10-30 1998-10-15 株式会社ブリヂストン Continuous surface treatment method and apparatus for sheet material
JP2952950B2 (en) * 1990-04-06 1999-09-27 エヌオーケー株式会社 Surface treatment method for fluoropolymer molded article
FR2692598B1 (en) * 1992-06-17 1995-02-10 Air Liquide Method for depositing a film containing silicon on the surface of a metal substrate and anti-corrosion treatment method.
FR2704558B1 (en) * 1993-04-29 1995-06-23 Air Liquide METHOD AND DEVICE FOR CREATING A DEPOSIT OF SILICON OXIDE ON A SOLID TRAVELING SUBSTRATE.
FR2711556B1 (en) * 1993-10-29 1995-12-15 Atohaas Holding Cv A method of depositing a thin layer on the surface of a plastic substrate.
ZA951048B (en) * 1994-02-16 1995-10-12 Coca Cola Co Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
JPH0822960A (en) * 1994-07-08 1996-01-23 Hitachi Ltd Plasma film forming equipment and forming method
US5783641A (en) * 1995-04-19 1998-07-21 Korea Institute Of Science And Technology Process for modifying surfaces of polymers, and polymers having surfaces modified by such process
DE19709673C2 (en) * 1997-03-11 2001-01-04 Heraeus Kulzer Gmbh & Co Kg Surface treatment processes
FR2770425B1 (en) * 1997-11-05 1999-12-17 Air Liquide METHOD AND DEVICE FOR THE SURFACE TREATMENT OF A SUBSTRATE BY ELECTRIC SHOCK BETWEEN TWO ELECTRODES IN A GAS MIXTURE
KR19990047370A (en) * 1997-12-04 1999-07-05 구자홍 Refrigeration and air conditioning metal materials with improved hydrophilicity or hydrophobicity of the surface and methods for improving the same

Also Published As

Publication number Publication date
KR20010088089A (en) 2001-09-26
EP1264005A4 (en) 2005-04-13
MXPA02008855A (en) 2003-02-10
CN1416477A (en) 2003-05-07
WO2001066824A1 (en) 2001-09-13
EP1264005A1 (en) 2002-12-11
US20030221950A1 (en) 2003-12-04
JP2003525979A (en) 2003-09-02
CN1219912C (en) 2005-09-21

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