AU2001231560A1 - Micromechanical, rotating device with a magnetic drive and method for the production thereof - Google Patents

Micromechanical, rotating device with a magnetic drive and method for the production thereof

Info

Publication number
AU2001231560A1
AU2001231560A1 AU2001231560A AU3156001A AU2001231560A1 AU 2001231560 A1 AU2001231560 A1 AU 2001231560A1 AU 2001231560 A AU2001231560 A AU 2001231560A AU 3156001 A AU3156001 A AU 3156001A AU 2001231560 A1 AU2001231560 A1 AU 2001231560A1
Authority
AU
Australia
Prior art keywords
micromechanical
production
rotating device
magnetic drive
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001231560A
Inventor
Given Not
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HANS HEINRICH GATZEN
Original Assignee
HANS HEINRICH GATZEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HANS HEINRICH GATZEN filed Critical HANS HEINRICH GATZEN
Publication of AU2001231560A1 publication Critical patent/AU2001231560A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K26/00—Machines adapted to function as torque motors, i.e. to exert a torque when stalled
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K99/00—Subject matter not provided for in other groups of this subclass
    • H02K99/20—Motors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
AU2001231560A 2000-12-08 2000-12-08 Micromechanical, rotating device with a magnetic drive and method for the production thereof Abandoned AU2001231560A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2000/012414 WO2002047241A1 (en) 2000-12-08 2000-12-08 Micromechanical, rotating device with a magnetic drive and method for the production thereof

Publications (1)

Publication Number Publication Date
AU2001231560A1 true AU2001231560A1 (en) 2002-06-18

Family

ID=8164196

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001231560A Abandoned AU2001231560A1 (en) 2000-12-08 2000-12-08 Micromechanical, rotating device with a magnetic drive and method for the production thereof

Country Status (2)

Country Link
AU (1) AU2001231560A1 (en)
WO (1) WO2002047241A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10260009B4 (en) * 2002-12-18 2007-12-27 Gatzen, Hans-Heinrich, Prof. Dr.-Ing. Read / write head with integrated microactuator
IL165212A (en) 2004-11-15 2012-05-31 Elbit Systems Electro Optics Elop Ltd Device for scanning light
AU2013219966B2 (en) 2012-02-15 2015-04-02 Apple Inc. Scanning depth engine
CN104221058B (en) 2012-03-22 2017-03-08 苹果公司 Scanning lens array equipped with universal joint
CN104520750B (en) 2012-07-26 2018-02-23 苹果公司 Twin axle scanning mirror
DE112013005128T5 (en) 2012-10-23 2015-08-13 Apple Inc. Production of micromechanical devices
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
KR20220027246A (en) 2019-08-18 2022-03-07 애플 인크. Force Balanced Micromirrors with Electromagnetic Actuation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100358A1 (en) * 1991-01-05 1992-07-09 Robotron Bueromasch Ag Vibrating mirror arrangement for deflection of optical beam - is set into oscillation by alternating current excitation of coil arrangement on back of semiconductor reflector
EP0657760A1 (en) * 1993-09-15 1995-06-14 Texas Instruments Incorporated Image simulation and projection system
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
DE19754676A1 (en) * 1997-12-10 1999-06-17 Thomas Dipl Ing Frank Arrangement for periodical diversion of rays of light
US6108117A (en) 1998-10-30 2000-08-22 Eastman Kodak Company Method of making magnetically driven light modulators
US6141139A (en) 1998-11-30 2000-10-31 Eastman Kodak Company Method of making a bistable micromagnetic light modulator

Also Published As

Publication number Publication date
WO2002047241A1 (en) 2002-06-13

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