AU2000278643A1 - Temperature compensated oscillating accelerometer with force multiplier - Google Patents

Temperature compensated oscillating accelerometer with force multiplier

Info

Publication number
AU2000278643A1
AU2000278643A1 AU2000278643A AU7864300A AU2000278643A1 AU 2000278643 A1 AU2000278643 A1 AU 2000278643A1 AU 2000278643 A AU2000278643 A AU 2000278643A AU 7864300 A AU7864300 A AU 7864300A AU 2000278643 A1 AU2000278643 A1 AU 2000278643A1
Authority
AU
Australia
Prior art keywords
temperature compensated
force multiplier
compensated oscillating
accelerometer
oscillating accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000278643A
Inventor
Jeffrey T Borenstein
David S. Nokes
Nathan A. St. Michel
Marc S. Weinberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Publication of AU2000278643A1 publication Critical patent/AU2000278643A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
AU2000278643A 2000-01-14 2000-10-05 Temperature compensated oscillating accelerometer with force multiplier Abandoned AU2000278643A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/483,326 US6269696B1 (en) 2000-01-14 2000-01-14 Temperature compensated oscillating accelerometer with force multiplier
US09483326 2000-01-14
PCT/US2000/027576 WO2001051934A1 (en) 2000-01-14 2000-10-05 Temperature compensated oscillating accelerometer with force multiplier

Publications (1)

Publication Number Publication Date
AU2000278643A1 true AU2000278643A1 (en) 2001-07-24

Family

ID=23919615

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000278643A Abandoned AU2000278643A1 (en) 2000-01-14 2000-10-05 Temperature compensated oscillating accelerometer with force multiplier

Country Status (3)

Country Link
US (1) US6269696B1 (en)
AU (1) AU2000278643A1 (en)
WO (1) WO2001051934A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1645847B1 (en) * 2004-10-08 2014-07-02 STMicroelectronics Srl Temperature compensated micro-electromechanical device and method of temperature compensation in a micro-electromechanical device
US7300814B2 (en) * 2004-12-16 2007-11-27 The Charles Stark Draper Laboratory, Inc. Method for fabricating micro-mechanical devices
US7302848B2 (en) 2005-03-10 2007-12-04 The Charles Stark Draper Laboratory, Inc. Force compensated comb drive
JP2008304262A (en) 2007-06-06 2008-12-18 Freescale Semiconductor Inc Temperature compensation circuit, trimming circuit and acceleration detecting apparatus
JP5257897B2 (en) * 2009-06-01 2013-08-07 フリースケール セミコンダクター インコーポレイテッド Output circuit
CN102435774B (en) * 2011-12-07 2013-01-09 浙江大学 Temperature compensation system and method for capacitance type micro-mechanical accelerometer
US9979088B2 (en) 2015-02-02 2018-05-22 The Charles Stark Draper Laboratory, Inc. Mechanical antenna
CN105258688B (en) * 2015-10-30 2017-12-22 北京航天控制仪器研究所 The micro- Micromachined Accelerometer Based on Resonant Principle of silicon with temperature stress compensation and vibration uncoupling ability
US10866258B2 (en) 2018-07-20 2020-12-15 Honeywell International Inc. In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry
US11493531B2 (en) 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same

Also Published As

Publication number Publication date
US6269696B1 (en) 2001-08-07
WO2001051934A1 (en) 2001-07-19

Similar Documents

Publication Publication Date Title
AU2002254496A1 (en) Anisotropic thermal solution
AU2002353816A1 (en) Accelerometer
AU2001286632A1 (en) Thermal cycler
AU2002213733A1 (en) Electronics arrangement
AU2001286051A1 (en) Microfluidic
AU2001290800A1 (en) High temperature piezoelectric sensor
AUPR419701A0 (en) An improved backpack
AU2002221177A1 (en) Vibration lipstick
AU2001262982A1 (en) Microscale mass spectrometric chemical-gas sensor
AU2002342500A1 (en) Thermally loaded component
AU2001275985A1 (en) Aggregation-based assays
AU2000278643A1 (en) Temperature compensated oscillating accelerometer with force multiplier
AU2001247438A1 (en) Thermally conductive sheet
AU2001290093A1 (en) Clock
AU2001269408A1 (en) Miniature thermal device
AU2001227514A1 (en) Mems-based spatial-light modulator with integrated electronics
AU4308800A (en) Temperature compensated inclinometer
AU2538201A (en) Engines with multipliers
AUPR853801A0 (en) Temperature compensated oscillator
AU2002215021A1 (en) Fastening element
AU2002216451A1 (en) Thermal footwear
AU2001295422A1 (en) Heat cabin
AU2002357512A1 (en) Oscillator
AU2001279721A1 (en) Structural member
AU2002321479A1 (en) Thermographic metthod