AU2000277597A1 - Virtual gauging system and method for lithography - Google Patents

Virtual gauging system and method for lithography

Info

Publication number
AU2000277597A1
AU2000277597A1 AU2000277597A AU7759700A AU2000277597A1 AU 2000277597 A1 AU2000277597 A1 AU 2000277597A1 AU 2000277597 A AU2000277597 A AU 2000277597A AU 7759700 A AU7759700 A AU 7759700A AU 2000277597 A1 AU2000277597 A1 AU 2000277597A1
Authority
AU
Australia
Prior art keywords
lithography
gauging system
virtual
virtual gauging
gauging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000277597A
Inventor
Joseph H. Lyons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2000277597A1 publication Critical patent/AU2000277597A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
AU2000277597A 2000-08-15 2000-08-15 Virtual gauging system and method for lithography Abandoned AU2000277597A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2000/040635 WO2002014955A1 (en) 2000-08-15 2000-08-15 Virtual gauging system and method for lithography

Publications (1)

Publication Number Publication Date
AU2000277597A1 true AU2000277597A1 (en) 2002-02-25

Family

ID=21742137

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000277597A Abandoned AU2000277597A1 (en) 2000-08-15 2000-08-15 Virtual gauging system and method for lithography

Country Status (2)

Country Link
AU (1) AU2000277597A1 (en)
WO (1) WO2002014955A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1777728A1 (en) * 2005-10-20 2007-04-25 Carl Zeiss SMS GmbH Lithography system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5825043A (en) * 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus

Also Published As

Publication number Publication date
WO2002014955A1 (en) 2002-02-21

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